Two error sources in grating projection profilometry: analysis and compensation

被引：0

作者：

Hao, YD ^{[1
]}

Zhao, Y ^{[1
]}

Li, DC ^{[1
]}

机构：

[1] Tsing Hua Univ, Dept Precis Instruments, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China

来源：

OPTICAL MANUFACTURING AND TESTING III | 1999年 / 3782卷

关键词：

profilometry; image point displacement; error analysis; error compensation;

D O I：

10.1117/12.369196

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper is introduced a new concept - image point displacement (IPD), on the basis of which the principles and key tasks of light pattern projection profilometry are re-interpreted and evaluated. Two error sources that have not been addressed adequately are analyzed in detail. One is coordinate deviation, which comes from the different magnification at different depth. The other is the nonlinearity of the phase-IPD and phase-height relationship. These error sources will be more and more non-negligible as researchers make their ways to improve accuracy and increase measuring range. Some compensation approaches are also proposed, which have been verified by numerical simulations and experiments.

引用

页码：554 / 558

页数：3

共 50 条

[41] Modeling, Error Analysis and Compensation in Phase-shifting Surface Profilers [J].

Hu, Qingying Jim .

DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS, 2011, 8133

[42] Error analysis and compensation of roll measuring device for roll grinder NC [J].

Yan Liwen ;

Wang Meiting ;

Tao, Yu .

ICEMI 2007: PROCEEDINGS OF 2007 8TH INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS, VOL III, 2007, :986-990

[43] Error analysis and correcting of 3-D profilometry based on quadrature demodulation [J].

Su, T ;

Zhang, YL .

OPTICAL INFORMATION PROCESSING TECHNOLOGY, 2002, 4929 :499-506

[44] Research for NC Milling Error Analysis and Compensation [J].

Sui, Xiulin ;

Zhao, Ping ;

Wang, Yaping .

FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE II, PTS 1-6, 2012, 121-126 :2167-2173

[45] The error analysis and correcting of scale tape grating encoder [J].

Pan, Nian ;

Ma, Wenli ;

Huang, Jinlong .

INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2013: LASER SENSING AND IMAGING AND APPLICATIONS, 2013, 8905

[46] Analysis and Compensation of Installation Errors for Circular Grating Angle Sensors [J].

Wang, Wen ;

Gao, Guanbin ;

Wu, Yaofeng ;

Chen, Zichen .

ADVANCED SCIENCE LETTERS, 2011, 4 (6-7) :2446-2451

[47] ANALYSIS AND COMPENSATION OF THE TIP POSE ERROR IN 6-PSS PARALLEL MECHANISM [J].

Gong Jianchun ;

Shi Wankai ;

Song Xiaofei .

METALURGIA INTERNATIONAL, 2013, 18 :264-267

[48] Suppression for Phase Error of Fringe Projection Profilometry Using Outlier-Detection Model: Development of an Easy and Accurate Method for Measurement [J].

Dong, Guangxi ;

Sun, Xiang ;

Kong, Lingbao ;

Peng, Xing .

PHOTONICS, 2023, 10 (11)

[49] Error analysis and compensation in position measurement of brake master cylinder compensation hole [J].

Jiang T. ;

Zhang G.-L. ;

Gao J.-P. .

Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2020, 28 (05) :1094-1100

[50] Projection Operators and Error Analysis of Complex Physical Domains in Isogeometric Analysis [J].

Hu D. ;

Wang X. ;

Wu M. .

Jisuanji Fuzhu Sheji Yu Tuxingxue Xuebao/Journal of Computer-Aided Design and Computer Graphics, 2019, 31 (05) :707-717

← 1 2 3 4 5 →