Two error sources in grating projection profilometry: analysis and compensation

被引：0

作者：

Hao, YD ^{[1
]}

Zhao, Y ^{[1
]}

Li, DC ^{[1
]}

机构：

[1] Tsing Hua Univ, Dept Precis Instruments, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China

来源：

OPTICAL MANUFACTURING AND TESTING III | 1999年 / 3782卷

关键词：

profilometry; image point displacement; error analysis; error compensation;

D O I：

10.1117/12.369196

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper is introduced a new concept - image point displacement (IPD), on the basis of which the principles and key tasks of light pattern projection profilometry are re-interpreted and evaluated. Two error sources that have not been addressed adequately are analyzed in detail. One is coordinate deviation, which comes from the different magnification at different depth. The other is the nonlinearity of the phase-IPD and phase-height relationship. These error sources will be more and more non-negligible as researchers make their ways to improve accuracy and increase measuring range. Some compensation approaches are also proposed, which have been verified by numerical simulations and experiments.

引用

页码：554 / 558

页数：3

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