Dissociative electron attachment to titatinum tetrachloride and titanium tetraisopropoxide

被引：33

作者：

Bjarnason, Elias H. ^{[1
]}

Omarsson, Benedikt ^{[1
]}

Engmann, Sarah ^{[1
]}

Omarsson, Frimann H. ^{[1
]}

Ingolfssona, Oddur ^{[1
]}

机构：

[1] Sci Inst Univ Iceland, Reykjavik, Iceland

来源：

EUROPEAN PHYSICAL JOURNAL D | 2014年 / 68卷 / 05期

关键词：

COBALT TRICARBONYL NITROSYL; BEAM-INDUCED DEPOSITION; CHEMICAL-VAPOR-DEPOSITION; NEGATIVE-ION FORMATION; INDUCED DECOMPOSITION; IMPACT IONIZATION; CROSS-SECTIONS; TICL4; PRECURSOR; ENERGY;

D O I：

10.1140/epjd/e2014-50091-9

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Here we present a dissociative electron attachment study of titanium tetrachloride and titanium tetraisopropoxide in the incident electron energy range from about 0-18 eV. The results are compared to electron impact ionization and fragmentation of these compounds and discussed in relation to the role of secondary electrons in focused electron beam induced deposition. We also use the opportunity and describe in detail a recently constructed crossed beam apparatus for the study of the energy dependency of ion formation in low energy electron interaction with gas phase molecules.

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页数：8

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