Pressure sensors for automotive applications - with new one chip EPROM technology

被引：0

作者：

Schmidt, R ^{[1
]}

Sakai, T ^{[1
]}

Ueyanagi, K ^{[1
]}

机构：

[1] Fuji Elect GmbH, Semicond Dept, D-60528 Frankfurt, Germany

来源：

ADVANCED MICROSYSTEMS FOR AUTOMOTIVE APPLICATIONS 2001 | 2001年

关键词：

48 bit EPROM; all in one chip solution; digital trimming by a 48 bit EPROM; high accuracy solution after assembled; low to high pressure; piezoresistor-pressure sensor; wide range of application;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Semiconductor pressure sensors have been applied widely in various fields, for example, automobile, medical or industrial use. The requests for small size, low cost, highly accurate and reliable pressure sensors have been increased The pressure sensor composed of a silicon diaphragm with piezoresistors, a CMOS amplifier and 48 bit EPROM for digital trimming is combining all mentioned characteristics in the same chip. A high accuracy solution by calibration after assembled can be realised. This new EPROM pressure sensor is suitable for a wide range of applications. Especially in the automotive field where demand of sensors is increasing. For example to achieve low emissions and cleaner exhaust gas to comply with environmental regulations, or sensors for the engine control unit and brake systems.

引用

页码：131 / 138

页数：8

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