Self-organization of quasi-equilibrium steady-state condensation in accumulative ion-plasma devices

We consider both theoretically and experimentally self-organization process of quasi-equilibrium steady-state condensation of sputtered substance in accumulative ion-plasma devices. It has been shown that the self-organization effect is caused by self-consistent variations of the condensate temperature and the supersaturation of depositing atoms. Two possible types of self-organization process have been found out on the basis of the phase-plane method. The aluminium condensation experimental data confirming the self-organization nature of quasi-equilibrium steady-state condensation are discussed. (C) 2009 Elsevier B.V. All rights reserved.