Effect of film gradient profile on adhesion strength, residual stress and effective hardness of functionally graded diamond-like carbon films

被引：20

作者：

Won, Yoo Jai ^{[1
]}

Ki, Hyungson ^{[1
]}

机构：

[1] Ulsan Natl Inst Sci & Technol, Sch Mech & Nucl Engn, Ulsan 689798, South Korea

来源：

APPLIED SURFACE SCIENCE | 2014年 / 311卷

基金：

新加坡国家研究基金会;

关键词：

Film gradient profile; Diamond-like carbon (DLC); Adhesion strength; Residual stress; Effective film hardness; PULSED-LASER DEPOSITION; HYDROGENATED AMORPHOUS-CARBON; MECHANICAL-PROPERTIES; DESIGN;

D O I：

10.1016/j.apsusc.2014.05.161

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We have studied, for the first time, the effect of continuously-varying film gradient profiles on the adhesion strength, residual stress, and effective film hardness of diamond-like carbon (DLC) films deposited on stainless steel substrates. Precisely graded DLC films with five polynomial profiles (linear, quadratic, cubic, square root and cubic root profiles) were investigated and compared with pure DLC films, and it was shown that by optimizing the film gradient profile the residual stress and adhesion characteristics can be significantly improved but the effective film hardness can be negatively affected. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：775 / 779

页数：5

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