Temperature Dependence of Shockley Stacking Fault Expansion and Contraction in 4H-SiC p-i-n Diodes

被引:3
|
作者
Caldwell, Joshua D. [1 ]
Stahlbush, Robert E. [1 ]
Glembocki, Orest J. [1 ]
Hobart, Karl D. [1 ]
Liu, Kendrick X. [1 ]
Tadjer, Marko J. [2 ]
机构
[1] USN, Res Lab, 4555 Overlook Ave SW, Washington, DC 20375 USA
[2] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA
来源
SILICON CARBIDE AND RELATED MATERIALS 2007, PTS 1 AND 2 | 2009年 / 600-603卷
关键词
Silicon carbide; stacking faults; Shockley; annealing; contraction; current-induced recovery; forward voltage drift; expansion; 4H-SiC; pin diodes; temperature dependence; PROPAGATION;
D O I
10.4028/www.scientific.net/MSF.600-603.273
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The nucleation and expansion of Shockley stacking faults (SSFs) in 4H-SiC is known to induce an increase in the forward voltage drop (V-f) of bipolar devices such as pin diodes. However, recent annealing experiments have shown that SSFs can not only expand, but that low temperature annealing (210-700 degrees C) induces a contraction of the SSFs that is coupled with a full and repeatable recovery of the V-f drift. Here we report that following extended periods of forward bias operation that the V-f drift of 10kV 4H-SiC pin diodes saturates, with the saturation V-f drift dropping with increasing stressing temperature. Upon reaching saturation, increases in temperature during forward bias operation at the same injection conditions also lead to a partial recovery of the V-f drift. Furthermore, the magnitude of this current-induced recovery is dependent upon the injection current, as reductions in the current cause a slower, but larger overall V-f drift recovery. All of these results clearly indicate that the current driving force models for SSF expansion are either incomplete or incorrect and that further efforts are required for a more complete understanding of SSF dynamics to be obtained.
引用
收藏
页码:273 / +
页数:2
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