3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance

被引:43
作者
Ferris, AnalS [1 ,2 ]
Bourrier, David [1 ]
Garbarino, Sebastien [2 ,3 ]
Guay, Daniel [2 ]
Pech, David [1 ]
机构
[1] Univ Toulouse, LAAS CNRS, F-31400 Toulouse, France
[2] INRS Energie Mat & Telecommun, 1650 Blvd Lionel Boulet, Varennes, PQ J3X 1S2, Canada
[3] PRIMA Quebec, 505 Blvd Maisonneuve Ouest, Montreal, PQ H3A 3C2, Canada
基金
欧洲研究理事会; 加拿大自然科学与工程研究理事会;
关键词
3D; interdigitated; microfabrication; microsupercapacitors; pseudocapacitance; ENERGY-DENSITY; MICRO-SUPERCAPACITORS; ELECTRODES; OXIDE; FILMS;
D O I
10.1002/smll.201901224
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Due to their high-power density and long lifetime, microsupercapacitors have been considered as an efficient energy supply/storage solution for the operation of small electronic devices. However, their fabrication remains confined to 2D thin-film microdevices with limited areal energy. In this study, the integration of all-solid-state 3D interdigitated microsupercapacitors on 4 in. silicon wafers with record energy density is demonstrated. The device electrodes are composed of a pseudocapacitive hydrated ruthenium dioxide RuO2 deposited onto highly porous current collectors. The encapsulated devices exhibit cell capacitance of 812 mF cm(-2) per footprint area at an energy density of 329 mJ cm(-2), which is the highest value ever reported for planar configuration. These components achieve one of the highest surface energy/power density trade-offs and address the issue of electrical energy storage of modern electronics.
引用
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页数:8
相关论文
共 54 条
[1]   Pseudocapacitive oxide materials for high-rate electrochemical energy storage [J].
Augustyn, Veronica ;
Simon, Patrice ;
Dunn, Bruce .
ENERGY & ENVIRONMENTAL SCIENCE, 2014, 7 (05) :1597-1614
[2]   Capacitive energy storage in micro-scale devices: recent advances in design and fabrication of micro-supercapacitors [J].
Beidaghi, Majid ;
Gogotsi, Yury .
ENERGY & ENVIRONMENTAL SCIENCE, 2014, 7 (03) :867-884
[3]   BPN a new thick negative photoresist with high aspect ratio for MEMS applications [J].
Bourrier, D. ;
Dilhan, M. ;
Ghannam, A. ;
Ourak, L. ;
Granier, H. .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (03) :419-423
[4]   To Be or Not To Be Pseudocapacitive? [J].
Brousse, Thierry ;
Belanger, Daniel ;
Long, Jeffrey W. .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2015, 162 (05) :A5185-A5189
[5]   Ideal Three-Dimensional Electrode Structures for Electrochemical Energy Storage [J].
Chabi, Sakineh ;
Peng, Chuang ;
Hu, Di ;
Zhu, Yanqiu .
ADVANCED MATERIALS, 2014, 26 (15) :2440-2445
[6]   Hydrous RuO2/carbon nanowalls hierarchical structures for all-solid-state ultrahigh-energy-density micro-supercapacitors [J].
Dinh, Ty Mai ;
Achour, Amine ;
Vizireanu, Sorin ;
Dinescu, Gheorghe ;
Nistor, Leona ;
Armstrong, Kevin ;
Guay, Daniel ;
Pech, David .
NANO ENERGY, 2014, 10 :288-294
[7]   Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy [J].
Durou, Hugo ;
Pech, David ;
Colin, David ;
Simon, Patrice ;
Taberna, Pierre-Louis ;
Brunet, Magali .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2012, 18 (04) :467-473
[8]   Engineering three-dimensional hybrid supercapacitors and microsupercapacitors for high-performance integrated energy storage [J].
El-Kady, Maher F. ;
Ihns, Melanie ;
Li, Mengping ;
Hwang, Jee Youn ;
Mousavi, Mir F. ;
Chaney, Lindsay ;
Lech, Andrew T. ;
Kaner, Richard B. .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2015, 112 (14) :4233-4238
[9]   Three-Dimensional Self-Supported Metal Oxides for Advanced Energy Storage [J].
Ellis, Brian L. ;
Knauth, Philippe ;
Djenizian, Thierry .
ADVANCED MATERIALS, 2014, 26 (21) :3368-3397
[10]   High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes [J].
Eustache, Etienne ;
Douard, Camille ;
Demortiere, Arnaud ;
De Andrade, Vincent ;
Brachet, Mylene ;
Le Bideau, Jean ;
Brousse, Thierry ;
Lethien, Christophe .
ADVANCED MATERIALS TECHNOLOGIES, 2017, 2 (10)