Pb0.3Sr0.7TiO3 thin films for high-frequency phase shifter applications

被引:49
作者
Jain, M [1 ]
Karan, NK
Katiyar, RS
Bhalla, AS
Miranda, FA
Van Keuls, FW
机构
[1] Univ Puerto Rico, Dept Phys, San Juan, PR 00931 USA
[2] Penn State Univ, Mat Res Lab, University Pk, PA 16802 USA
[3] NASA, Glenn Res Ctr, Cleveland, OH 44135 USA
[4] Ohio Aerosp Inst, Cleveland, OH 44142 USA
基金
美国国家航空航天局;
关键词
D O I
10.1063/1.1771459
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pb0.3Sr0.7TiO3 (PST30) thin films were synthesized on platinized silicon (Pt/Si) and lanthanum aluminate (LAO) substrates using chemical solution deposition technique. The films on LAO substrate were highly (100) oriented, whereas the films on Pt/Si substrate were polycrystalline. The low dielectric loss in the PST30/LAO films makes them attractive for fabricating tunable dielectric devices. An eight-element coupled microstrip phase shifter was fabricated on PST30/LAO film and tested in the frequency range similar to15-17 GHz. The maximum figure of merit (kappa=phase shift per dB loss) of similar to56degrees/dB was obtained for PST30 film, which was better than commonly observed value in pure barium strontium titanate films: This makes PST30 a potential candidate material for further investigations for microwave applications. (C) 2004 American Institute of Physics.
引用
收藏
页码:275 / 277
页数:3
相关论文
共 21 条
[1]   Tunable dielectric properties of BST thin films for RF/MW passive components [J].
Bellotti, J ;
Akdogan, EK ;
Safari, A ;
Chang, W ;
Kirchoefer, S .
INTEGRATED FERROELECTRICS, 2002, 49 :113-122
[2]   Pulsed laser deposition of ferroelectric Pb0.6Sr0.4TiO3 thin films on perovskite substrates [J].
Chou, CC ;
Hou, CS ;
Chang, GC ;
Cheng, HF .
APPLIED SURFACE SCIENCE, 1999, 142 (1-4) :413-417
[3]   (Pb,Sr)TiO3 thin films for a ULSI DRAM capacitor prepared by liquid source misted chemical deposition [J].
Chung, HJ ;
Kim, JH ;
Woo, SI .
CHEMISTRY OF MATERIALS, 2001, 13 (05) :1441-+
[4]   Tailoring of BST and MgO layers for phase shifter applications [J].
Jain, M ;
Majumder, SB ;
Katiyar, RS ;
Bhalla, AS ;
Miranda, FA ;
Van Keuls, FW .
INTEGRATED FERROELECTRICS, 2004, 60 :59-68
[5]   Phase transition behavior of highly (100) textured sol-gel-derived Ba0.5Sr0.5TiO3 thin films [J].
Jain, M ;
Majumder, SB ;
Katiyar, RS ;
Desu, SB .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (06) :789-792
[6]   Synthesis and characterization of lead strontium titanate thin films by sol-gel technique [J].
Jain, M ;
Majumder, SB ;
Guo, R ;
Bhalla, AS ;
Katiyar, RS .
MATERIALS LETTERS, 2002, 56 (05) :692-697
[7]  
JAIN M, 2002, MAT RES SOC S S P, V668
[8]  
JAIN M, UNPUB
[9]   Characteristics of (Pb1-xSrx)TiO3 thin film prepared by a chemical solution processing [J].
Kang, DH ;
Kim, JH ;
Park, JH ;
Yoon, KH .
MATERIALS RESEARCH BULLETIN, 2001, 36 (1-2) :265-276
[10]   Structure and dielectrical properties of (Pb,Sr)TiO3 thin films for tunable microwave device [J].
Kim, KT ;
Kim, CI .
THIN SOLID FILMS, 2002, 420 :544-547