Large-aperture high-accuracy phase-shifting digital flat interferometer

被引：18

作者：

Chen, JB ^{[1
]}

Song, DZ ^{[1
]}

Zhu, RH ^{[1
]}

Wang, Q ^{[1
]}

Chen, L ^{[1
]}

Chen, DJ ^{[1
]}

机构：

[1] ANHUI INST TECHNOL, HEFEI 230031, ANHUI, PEOPLES R CHINA

来源：

OPTICAL ENGINEERING | 1996年 / 35卷 / 07期

关键词：

phase-shifting interferometry; plane standards;

D O I：

10.1117/1.600627

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A large-aperture high-accuracy phase-shifting digital flat interferometer that is a combination of optics, mechanics, electricity, and algorithm is described, The aperture size is 250 mm and a liquid surface is used as an absolute flat to eliminate system error. The accuracy is better than lambda/50 (lambda=0.6328 mu m, peak-to-valley value). The tested aperture can be enlarged to 500 mm. This interferometer has been used as an optical flat standard instrument for China. The optical interferometer, phase shifter, and calibration of precision are described. (C) 1996 Society of Photo-Optical Instrumentation Engineers.

引用

页码：1936 / 1942

页数：7

共 11 条

[1] DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].

BRUNING, JH ;

HERRIOTT, DR ;

GALLAGHER, JE ;

ROSENFELD, DP ;

WHITE, AD ;

BRANGACCIO, DJ .

APPLIED OPTICS, 1974, 13 (11) :2693-2703

[2] FIZEAU INTERFEROMETER FOR MEASURING FLATNESS OF OPTICAL SURFACES [J].

BUNNAGEL, R ;

OEHRING, HA ;

STEINER, K .

APPLIED OPTICS, 1968, 7 (02) :331-&

[3]

CHEN JB, 1991, P SOC PHOTO-OPT INS, V1553, P616

[4]

CREATH K, 1992, P SOC PHOTO-OPT INS, V1720, P428, DOI 10.1117/12.132150

[5]

JINBANG C, 1990, ACTA ARM SIN, P54

[6] TWO-DIMENSIONAL FRINGE-PATTERN ANALYSIS [J].

MACY, WW .

APPLIED OPTICS, 1983, 22 (23) :3898-3901

[7]

Rihong Zhu, 1993, Proceedings of the SPIE - The International Society for Optical Engineering, V2003, P355

[8] DIGITAL WAVE-FRONT MEASURING INTERFEROMETRY - SOME SYSTEMATIC-ERROR SOURCES [J].

SCHWIDER, J ;

BUROW, R ;

ELSSNER, KE ;

GRZANNA, J ;

SPOLACZYK, R ;

MERKEL, K .

APPLIED OPTICS, 1983, 22 (21) :3421-3432

[9] PHASE-SHIFTING INTERFEROMETRY - REFERENCE PHASE ERROR REDUCTION [J].

SCHWIDER, J .

APPLIED OPTICS, 1989, 28 (18) :3889-3892

[10] FOURIER-TRANSFORM METHOD OF FRINGE-PATTERN ANALYSIS FOR COMPUTER-BASED TOPOGRAPHY AND INTERFEROMETRY [J].

TAKEDA, M ;

INA, H ;

KOBAYASHI, S .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1982, 72 (01) :156-160

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