Piezoresistive feedback for improving transient response of MEMS thermal actuators

被引：3

作者：

Messenger, Robert K. ^{[1
]}

McLain, Timothy W. ^{[1
]}

Howell, Larry L. ^{[1
]}

机构：

[1] Brigham Young Univ, Provo, UT 84602 USA

来源：

SMART STRUCTURES AND MATERIALS 2006: SENSORS AND SMART STRUCTURES TECHNOLOGIES FOR CIVIL, MECHANICAL , AND AEROSPACE SYSTEMS, PTS 1 AND 2 | 2006年 / 6174卷

关键词：

piezoresistive sensors; thermal microactuator; MEMS; nanopositioner; feedback control;

D O I：

10.1117/12.657954

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

We examine exploiting the inherent piezoresistivity of a polysilicon compliant mechanism to provide feedback sensing of the mechanism displacement. As the piezoresistive compliant mechanism deflects to produce motion its resistance changes producing a usable signal. The goal of this work is to improve the transient response of a thermal actuator through piezoresistive feedback control. Implementing feedback control significantly improves the actuators transient response. The actuator response time to step inputs is reduced from 800 mu s to 230 mu s with proportional control alone. The system bandwidth was increased from 500 Hz to 4 kHz with proportional control. The large overshoot in the step response or the resonant peak in the frequency response can be reduce by an appropriately tuned 2 kHz notch prefilter.

引用

页数：12

共 17 条

[1] Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator [J].