Oxidation Sharpening, Template Stripping, and Passivation of Ultra-Sharp Metallic Pyramids and Wedges

被引：13
作者：
Im, Hyungsoon [1 ]
Oh, Sang-Hyun [1 ]
机构：
[1] Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA
来源：
SMALL | 2014年 / 10卷 / 04期
基金：
美国国家科学基金会;
关键词：
template stripping; metallic pyramid; plasmonic nanofocusing; atomic layer deposition; near-field optical microscopy; ENHANCED RAMAN-SPECTROSCOPY; ATOMIC LAYER DEPOSITION; SILICON-NITRIDE CANTILEVERS; PLASMONIC NANOSTRUCTURES; CHEMICAL-STABILITY; FORCE MICROSCOPY; TIPS; TEMPERATURE; FABRICATION; OVERLAYERS;
D O I：
10.1002/smll.201301475
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al 2O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：680 / 684
页数：5
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