Diamond Nucleation by Carbon Transport from Buried Nanodiamond TiO2 Sol-Gel Composites

被引:27
作者
Daenen, Michael [1 ]
Zhang, Liang [5 ]
Erni, Rot [5 ]
Williams, Oliver Aneurin [1 ,3 ]
Hardy, An [1 ,3 ,4 ]
Van Bael, Marlies Karolien [1 ,3 ]
Wagner, Patrick [1 ]
Haenen, Ken [1 ,3 ]
Nesladek, Milos [1 ,2 ,3 ]
Van Tendeloo, Gustaaf [5 ]
机构
[1] Hasselt Univ, Inst Mat Res, B-3950 Diepenbeek, Belgium
[2] Acad Sci Czech Republ VVI, Inst Phys, Prague 182400, Czech Republic
[3] IMEC Vzw, Div IMOMEC, B-3950 Diepenbeek, Belgium
[4] XIOS Hogesch Limburg, Dept Ind Sci & Technol, B-3590 Diepenbeek, Belgium
[5] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium
关键词
CHEMICAL-VAPOR-DEPOSITION; NANOCRYSTALLINE DIAMOND; GROWTH; SILICON; FILMS; SUBSTRATE; TITANIUM; SURFACES; PLASMA;
D O I
10.1002/adma.200802305
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Diamond nucleation and growth can occur by diffusion of carbon from buried ultradispersed diamond seeds on a silicon substrate through a titanium oxide interlayer. This knowledge can improve nucleation and adhesion of thin diamond films on various substrates.
引用
收藏
页码:670 / +
页数:5
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