Diamond Nucleation by Carbon Transport from Buried Nanodiamond TiO2 Sol-Gel Composites

被引：27

作者：

Daenen, Michael ^{[1
]}

Zhang, Liang ^{[5
]}

Erni, Rot ^{[5
]}

Williams, Oliver Aneurin ^{[1
,3
]}

Hardy, An ^{[1
,3
,4
]}

Van Bael, Marlies Karolien ^{[1
,3
]}

Wagner, Patrick ^{[1
]}

Haenen, Ken ^{[1
,3
]}

Nesladek, Milos ^{[1
,2
,3
]}

Van Tendeloo, Gustaaf ^{[5
]}

机构：

[1] Hasselt Univ, Inst Mat Res, B-3950 Diepenbeek, Belgium

[2] Acad Sci Czech Republ VVI, Inst Phys, Prague 182400, Czech Republic

[3] IMEC Vzw, Div IMOMEC, B-3950 Diepenbeek, Belgium

[4] XIOS Hogesch Limburg, Dept Ind Sci & Technol, B-3590 Diepenbeek, Belgium

[5] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium

来源：

ADVANCED MATERIALS | 2009年 / 21卷 / 06期

关键词：

CHEMICAL-VAPOR-DEPOSITION; NANOCRYSTALLINE DIAMOND; GROWTH; SILICON; FILMS; SUBSTRATE; TITANIUM; SURFACES; PLASMA;

D O I：

10.1002/adma.200802305

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Diamond nucleation and growth can occur by diffusion of carbon from buried ultradispersed diamond seeds on a silicon substrate through a titanium oxide interlayer. This knowledge can improve nucleation and adhesion of thin diamond films on various substrates.

引用

页码：670 / +

页数：5

共 24 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES
ANGUS, JC
HAYMAN, CC
[J]. SCIENCE, 1988, 241 (4868) : 913 - 921
[2] Diamond nanoseeding on silicon:: Stability under H2 MPCVD exposures and early stages of growth
Arnault, J. C.
Saada, S.
Nesladek, M.
Williams, O. A.
Haenen, K.
Bergonzo, P.
Osawa, E.
[J]. DIAMOND AND RELATED MATERIALS, 2008, 17 (7-10) : 1143 - 1149
[3] Mechanisms of CVD diamond nucleation and growth on mechanically scratched Si(100) surfaces
Arnault, JC
Demuynck, L
Speisser, C
Le Normand, F
[J]. EUROPEAN PHYSICAL JOURNAL B, 1999, 11 (02) : 327 - 343
[4] Interaction between titanium and carbon at moderate temperatures
Arvieu, C
Manaud, JP
Quenisset, JM
[J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2004, 368 (1-2) : 116 - 122
[5] Studies of heteroepitaxial growth of diamond
Bednarski, C
Dai, Z
Li, AP
Golding, B
[J]. DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 241 - 245
[6] Synthesis of TiC-WCsolution in hydrogen containing an equilibrium amount of methane
Bondarenko, VP
Korablev, SF
Epik, IV
[J]. REFRACTORIES AND INDUSTRIAL CERAMICS, 1999, 40 (7-8) : 289 - 291
[7] Reduction of titanium dioxide in a nonequilibrium hydrogen plasma
Bullard, DE
Lynch, DC
[J]. METALLURGICAL AND MATERIALS TRANSACTIONS B-PROCESS METALLURGY AND MATERIALS PROCESSING SCIENCE, 1997, 28 (06): : 1069 - 1080
[8] Defect formation in graphene nanosheets by acid treatment: an x-ray absorption spectroscopy and density functional theory study
Coleman, V. A.
Knut, R.
Karis, O.
Grennberg, H.
Jansson, U.
Quinlan, R.
Holloway, B. C.
Sanyal, B.
Eriksson, O.
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2008, 41 (06)
[9] Seeding, growth and characterization of nanocrystalline diamond films on various substrates
Daenen, M.
Williams, O. A.
D'Haen, J.
Haenen, K.
Nesladek, M.
[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2006, 203 (12): : 3005 - 3010
[10] HOMOGENEOUS NUCLEATION PROCESS - ANALYTICAL APPROACH
DEMO, P
KOZISEK, Z
[J]. PHYSICAL REVIEW B, 1993, 48 (06) : 3620 - 3625

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