Effect of Li doping on the structural, optical and electrical properties of spray deposited SnO2 thin films

被引：103

作者：

Joseph, D. Paul ^{[1
]}

Renugambal, P. ^{[1
]}

Saravanan, M. ^{[1
]}

Raja, S. Philip ^{[1
]}

Venkateswaran, C. ^{[1
]}

机构：

[1] Univ Madras, Ctr Mat Sci, Dept Nucl Phys, Madras 600025, Tamil Nadu, India

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 21期

关键词：

Tin oxide; Figure of merit; Transparent conducting oxides; Spray pyrolysis; Lithium doping; Surface morphology; FLUORINE;

D O I：

10.1016/j.tsf.2009.04.047

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Studies on spray deposited transparent conducting Li doped SnO2 thin films are scarce. Li (0 to 5 wt.%) doped SnO2 thin films spray deposited onto glass substrates at 773 K in air from chloride precursors were studied for their structural, optical and temperature dependent electrical behaviors. X-ray diffraction patterns indicated single phase with polycrystalline nature. Systematic variation in surface morphology on Li doping was examined by scanning electron microscopy and atomic force microscopy. Film thickness, optical band gap (direct and indirect), sheet resistance and figure of merit were computed from spectral transmittance and temperature dependent resistivity data. Lithium doping was found to decrease the value of sheet resistance by an order in magnitude. Activation energy was computed from temperature dependent electrical resistivity data measured in the range 300 to 448 K. The 4 wt.% Li doped SnO2 film was found to have a high value of figure of merit among other films. The results are discussed. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：6129 / 6136

页数：8

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