Laser ablation of silicon induced by a femtosecond optical vortex beam

被引：50

作者：

Nivas, Jijil J. J. ^{[1
,2
]}

He Shutong ^{[1
,3
]}

Anoop, K. K. ^{[1
,2
]}

Rubano, A. ^{[1
,2
]}

Fittipaldi, R. ^{[4
]}

Vecchione, A. ^{[4
]}

Paparo, D. ^{[2
]}

Marrucci, L. ^{[1
,2
]}

Bruzzese, R. ^{[1
,2
]}

Amoruso, S. ^{[1
,2
]}

机构：

[1] Univ Naples Federico II, Dipartimento Fis, I-80126 Naples, Italy

[2] UOS Napoli, CNR SPIN, I-80126 Naples, Italy

[3] Tianjin Univ, Coll Precis Instruments & Optoelect Engn, Key Lab Optoelect Informat Tech Sci, Ultrafast Laser Lab,Minist Educ, Tianjin 300072, Peoples R China

[4] UOS Salerno, CNR SPIN, I-84084 Fisciano, Italy

来源：

OPTICS LETTERS | 2015年 / 40卷 / 20期

关键词：

PULSES; FIELDS; FILMS;

D O I：

10.1364/OL.40.004611

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We investigate laser ablation of crystalline silicon induced by a femtosecond optical vortex beam, addressing how beam properties can be obtained by analyzing the ablation crater. The morphology of the surface structures formed in the annular crater surface allows direct visualization of the beam polarization, while analysis of the crater size provides beam spot parameters. We also determine the diverse threshold fluences for the formation of various complex microstructures generated within the annular laser spot on the silicon sample. Our analysis indicates an incubation behavior of the threshold fluence as a function of the number of laser pulses, independent of the optical vortex polarization, in weak focusing conditions. (C) 2015 Optical Society of America

引用

页码：4611 / 4614

页数：4

共 26 条

[1] Complete wavefront and polarization control for ultrashort-pulse laser microprocessing
Allegre, O. J.
Jin, Y.
Perrie, W.
Ouyang, J.
Fearon, E.
Edwardson, S. P.
Dearden, G.
[J]. OPTICS EXPRESS, 2013, 21 (18): : 21198 - 21207
[2] Synthesis of nanocrystal films via femtosecond laser ablation in vacuum
Amoruso, S
Ausanio, G
Bruzzese, R
Lanotte, L
Scardi, P
Vitiello, M
Wang, X
[J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 2006, 18 (04) : L49 - L53
[3] Structural characterization of nanoparticles-assembled titanium dioxide films produced by ultrafast laser ablation and deposition in background oxygen
Amoruso, S.
Tuzi, S.
Pallotti, D. K.
Aruta, C.
Bruzzese, R.
Chiarella, F.
Fittipaldi, R.
Lettieri, S.
Maddalena, P.
Sambri, A.
Vecchione, A.
Wang, X.
[J]. APPLIED SURFACE SCIENCE, 2013, 270 : 307 - 311
[4] Direct femtosecond laser ablation of copper with an optical vortex beam
Anoop, K. K.
Fittipaldi, R.
Rubano, A.
Wang, X.
Paparo, D.
Vecchione, A.
Marrucci, L.
Bruzzese, R.
Amoruso, S.
[J]. JOURNAL OF APPLIED PHYSICS, 2014, 116 (11)
[5] Femtosecond laser surface structuring of silicon using optical vortex beams generated by a q-plate
Anoop, K. K.
Rubano, A.
Fittipaldi, R.
Wang, X.
Paparo, D.
Vecchione, A.
Marrucci, L.
Bruzzese, R.
Amoruso, S.
[J]. APPLIED PHYSICS LETTERS, 2014, 104 (24)
[6] Femtosecond laser ablation of silicon-modification thresholds and morphology
Bonse, J
Baudach, S
Krüger, J
Kautek, W
Lenzner, M
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 74 (01): : 19 - 25
[7] Bessel and annular beams for materials processing
Duocastella, Marti
Arnold, Craig B.
[J]. LASER & PHOTONICS REVIEWS, 2012, 6 (05) : 607 - 621
[8] Physics of ultra-short laser interaction with matter: From phonon excitation to ultimate transformations
Gamaly, E. G.
Rode, A. V.
[J]. PROGRESS IN QUANTUM ELECTRONICS, 2013, 37 (05) : 215 - 323
[9] Surface structures induced by ultrashort laser pulses: Formation mechanisms of ripples and grooves
He, Shutong
Nivas, Jijil J. J.
Anoop, K. K.
Vecchione, Antonio
Hu, Minglie
Bruzzese, Riccardo
Amoruso, Salvatore
[J]. APPLIED SURFACE SCIENCE, 2015, 353 : 1214 - 1222
[10] Her TH, 2011, COMPREHENSIVE NANOSCIENCE AND TECHNOLOGY, VOL 4: NANOFABRICATION AND DEVICES, P277

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