共 62 条
[32]
Huang K, 2005, VALUE MULTISTAGE STO
[33]
Huang MG, 2002, 2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP, P227
[37]
KARABUK S, 2001, THESIS LEHIGH U
[38]
Kotcher R., 1999, 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314), P73, DOI 10.1109/ISSM.1999.808741
[39]
Queueing network models in the design and analysis of semiconductor wafer fabs
[J].
IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION,
2001, 17 (05)
:548-561
[40]
Leachman R., 1993, OPTIMIZATION IND, P1