A comparative study on the microstructure and tribological properties of Si3N4 and TIN films produced by the IBED method

被引：0

作者：

Zhuang, DM ^{[1
]}

Liu, JJ ^{[1
]}

Zhu, BL ^{[1
]}

Li, WZ ^{[1
]}

Zhang, XS ^{[1
]}

Yang, SR ^{[1
]}

机构：

[1] LANZHOU INST CHEM PHYS,SOLID LUBRICAT LAB,LANZHOU,PEOPLES R CHINA

来源：

TRIBOLOGY INTERNATIONAL | 1996年 / 29卷 / 06期

关键词：

ceramic thin film; ion beam enhanced deposition; friction; wear; wear resistance;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The tribological properties of Si3N4 and TiN thin films produced by ion beam enhanced deposition (IBED) were compared on a SRV friction and wear testing machine. The friction coefficient of all thin films shows a descending tendency with increase in load, and is lower than that of 52100 steel. All the IBED films show a much better wear resistance than 52100 steel, especially in the higher load and frequency ranges; it can reach six times that of the latter. In order to understand the reasons for their excellent properties, the microstructure, microhardness and bonding strength with the substrate were analysed by SEM, X-ray diffraction, Knoop hardness and scratching test methods separately. The results show that the TiN(1) film exhibits the best tribological properties, which are closely related with its greater hardness and bonding strength. Copyright (C) 1996 Elsevier Science Ltd

引用

页码：507 / 513

页数：7

共 9 条

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