Microfabrication - From invention to innovation

Microfabrication is based on precision engineering and semiconductor fabrication technologies, extending the successful concept of miniaturization from microelectronic circuits to mechanical, optical, fluidic, chemical and other functional elements. A variety of microfabrication technologies has been developed in the last two decades which allow the production of threedimensional ultra precise components without major restrictions in design and materials. Bulk-and surface micromachining of silicon, laser-based processes, the LIGA technique, mi cro spark erosion and micromilling as well as a number of etching processes have led to a broad spectrum of new products covering nearly all sectors of modern technologies. The paper deals in particular with the LIGA technology, which combines an extremely high precision with a wide variety of materials and the capability for a cost effective mass replication. This technique has marked a way from invention to innovation in microtechnology by creating a broad basis for advanced products and new markets.