Transparent AIN layers formed by metal plasma immersion ion implantation and deposition

被引：4

作者：

Mändl, S ^{[1
]}

Manova, D ^{[1
]}

Rauschenbach, B ^{[1
]}

机构：

[1] Leipniz Inst Oberflachenmodifizierung, D-04303 Leipzig, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2004年 / 186卷 / 1-2期

关键词：

AIN; ERDA; IR-spectroscopy; spectroscopic ellipsometry;

D O I：

10.1016/j.surfcoat.2004.04.017

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Aluminum nitride is a very attractive semiconductor material, suitable for UV optoelectronics due to its large band gap. The influence of the ion bombardment during energetic deposition with metal plasma immersion ion implantation and deposition (MePIIID) on the defect structure and hence the optical properties is investigated for a pulse voltage between 0 and 5 kV at a duty cycle of 9%. With increasing voltage, anti-site defects are decreasing. However, secondary effects as increased oxygen adsorption and oxygen complex formation suggest that the simultaneous heating of the sample by the incoming ions is responsible for this effect and ions even at 5 keV might produce more damage than they remove. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：82 / 87

页数：6

共 50 条

[31] Recent experiments on plasma immersion ion implantation (and deposition) using discharges inside metal tubes
Ueda, M.
Silva, C.
Marcondes, A. R.
Reuther, H.
de Souza, G. B.
SURFACE & COATINGS TECHNOLOGY, 2018, 355 : 98 - 110
[32] Hemocompatibility of titanium-based coatings prepared by metal plasma immersion ion implantation and deposition
Tsyganov, I. A.
Maitz, M. F.
Richter, E.
Reuther, H.
Mashina, A. I.
Rustichelli, F.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 257 : 122 - 127
[33] Silicon coating deposition on NiTi substrate by plasma immersion ion implantation and deposition
Kashin, O. A.
Krukovskii, K. V.
Slabodchikov, V. A.
Lotkov, A. I.
14TH INTERNATIONAL CONFERENCE GAS DISCHARGE PLASMAS AND THEIR APPLICATIONS, 2019, 1393
[34] Composition, structure and morphology of oxide layers formed on austenitic stainless steel by oxygen plasma immersion ion implantation
Anandan, C.
Rajam, K. S.
APPLIED SURFACE SCIENCE, 2007, 253 (16) : 6854 - 6859
[35] Ion enhanced deposition by dual titanium and acetylene plasma immersion ion implantation
Zeng, ZM
Tian, XB
Chu, PK
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (01): : 175 - 179
[36] Diamond-like carbon formed by plasma immersion ion implantation and deposition technique on 304 stainless steel
Pakpum, C
Pasaja, N
Boonyawan, D
Suanpoot, P
Srisantithum, P
Silawatshananai, C
Vilaithong, T
PARTICLE BEAMS & PLASMA INTERACTION ON MATERIALS AND ION & PLASMA SURFACE FINISHING 2004, 2005, 107 : 129 - 132
[37] Treatment of various surface treated layers by plasma immersion ion implantation
Blawert, C
Mordike, BL
Weisheit, A
SURFACE & COATINGS TECHNOLOGY, 1997, 93 (2-3): : 297 - 304
[38] Ion implantation by plasma immersion
Thomae, R
Bender, H
Halder, J
Hilschert, F
Klein, H
Schafer, J
Seiler, B
ION IMPLANTATION TECHNOLOGY - 96, 1997, : 757 - 759
[39] Plasma immersion ion implantation
Xia, Lifang
Sun, Yue
Ma, Xinxin
Lizi Jiaohuan Yu Xifu/Ion Exchange and Adsorption, 1995, 11 (01): : 3 - 6
[40] Methane and nitrogen plasma immersion ion implantation of titanium metal
Tang, BY
Chu, PK
Wang, SY
Chow, KW
Wang, XF
SURFACE & COATINGS TECHNOLOGY, 1998, 104 : 248 - 251

← 1 2 3 4 5 →