Nitride-based high electron mobility transistors with a GaN spacer

被引:31
作者
Palacios, T. [1 ]
Shen, L.
Keller, S.
Chakraborty, A.
Heikman, S.
DenBaars, S. P.
Mishra, U. K.
Liberis, J.
Kiprijanovic, O.
Matulionis, A.
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] Inst Semicond Phys, LT-01108 Vilnius, Lithuania
关键词
D O I
10.1063/1.2335514
中图分类号
O59 [应用物理学];
学科分类号
摘要
A GaN/ultrathin AlN/GaN heterojunction has been used to introduce a GaN spacer between the GaN channel and the AlGaN barrier in AlGaN/GaN high electron mobility transistors (HEMTs). In conventional AlGaN/GaN devices, the alloy scattering of the electrons with the AlGaN barrier degrades the electron velocity at high electric fields. This effect is significantly reduced in GaN-spacer transistors, which therefore have much better high field transport properties. While the dc performance of these transistors is similar to conventional AlGaN/GaN HEMTs, a 20% increase in the electron velocity has been measured by two different techniques. (c) 2006 American Institute of Physics.
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页数:3
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