3DX: An X-ray pixel array detector with active edges

被引:16
作者
Parker, Sherwood I. [1 ]
Kenney, Christopher J.
Gnani, Dario
Thompson, Albert C.
Mandelli, Emanuele
Meddeler, Gerrit
Hasi, Jasmine
Morse, John
Westbrook, Edwin M.
机构
[1] Univ Hawaii, Honolulu, HI 96822 USA
[2] Mol Biol Consortium, Chicago, IL 60612 USA
[3] Lawrence Berkeley Lab, Berkeley, CA 94720 USA
[4] Brunel Univ, Uxbridge UB8 3PH, Middx, England
基金
美国国家卫生研究院;
关键词
active edges; detectors; guard rings; insensitive edge regions; protein crystallography; semiconductor sensors; silicon sensors; structural molecular biology; three-dimensional (3D) electrodes; 3D sensors; X-ray detectors;
D O I
10.1109/TNS.2006.873713
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We are developing a prototype X-ray detection system that should be ideal for many types of synchrotron science. X-rays are captured directly in thick, high-resistivity, single-crystal, silicon pixel sensors. Unlike other X-ray detectors, which have a substantial dead area around their borders, these have "active edges"-edges formed from electrodes in the third dimension, perpendicular to the top and bottom surfaces,with full sensitivity to within a micron of the physical border. Each sensor is 0.96 mm x 0.96 mm, having a 64 x 64 two-dimensional array of 150 mu m pixels. Behind each sensor, a custom CMOS readout chip is bump-bonded to the sensor. It provides high-speed (64 mu s/full-array) readout of each pixel, with a dead time for each row, during pixel reset, of 1 mu s. On three edges, it lies completely hidden behind the sensor. A 3 mm wide region on the remaining edge of each CMOS chip contains readout circuits and connections. Here it protrudes beyond the sensor edge, but is covered by the active region of a neighboring sensor module in an array similar to that of shingles on a roof. Sensor units can be easily arrayed to cover large areas. The readout chip has 128 ADCs and, for each pixel, a charge amplifier. To save fabrication costs, the prototype readout has just 8 x 64 pixels. Using pulse heights, we should be able to combine signals when X-rays share charge between adjacent pixels. We have already made accurate quantum-counts of 0 to 7 X-ray events/pixel during each 64 mu s readout cycle.
引用
收藏
页码:1676 / 1688
页数:13
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