Fabrication of Patterned Array of Alumina-Metal Coaxial Nanorods

In this research, a novel template based approach for the fabrication of patterned array of alumina/metal coaxial nanorods was investigated. The orderly uneven barrier-layer surface of an anodic aluminum oxide (AAO) membrane was used as a template. The thickness of the barrier-layer was reduced by phosphoric acid etching. Following, the desired pattern was transferred to the barrier-layer by photolithographic process. A thin Au film was deposited on the photolithographic patterned barrier-layer surface by evaporation as the electrode for further electrodepositing. Nickel nanorods were electrodeposited into the nanochannels at the patterned area. Phosphoric acid was then used to gradually etch off the alumina at the unpatterned area to form a patterned nanostructure of bundles of alumina/metal coaxial nanorods.