Investigation on the nonlinear relationship between relative velocity and material removal in bonnet polishing

被引:0
作者
Shi, Chenchun [1 ,2 ]
Peng, Yunfeng [1 ,2 ]
Hou, Liang [1 ]
Wang, Zhenzhong [1 ]
Guo, Yinbiao [1 ]
Tang, Qilin [1 ,2 ]
Li, Chenlei [1 ,2 ]
Chen, Dengling [1 ,2 ]
机构
[1] Xiamen Univ, Dept Mech & Elect Engn, Xiamen 361005, Peoples R China
[2] Xiamen Univ, Shenzhen Res Inst, Shenzhen 518057, Peoples R China
来源
9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBDIFFRACTION-LIMITED PLASMONIC LITHOGRAPHY AND INNOVATIVE MANUFACTURING TECHNOLOGY | 2019年 / 10842卷
关键词
nonlinear; relative velocity; material removal; bonnet polishing; TOOL INFLUENCE FUNCTION; SURFACE GENERATION; RATE DECAY; CONTACT; MODEL; WEAR; SIMULATION; FORCE;
D O I
10.1117/12.2506755
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
There has been many models for material removal mechanisms of bonnet polishing (BP) based on the well-known Preston model. However, some experimental investigations have demonstrated that the relationship between process parameters and material removal are not linear at all, especially the relative velocity, which cannot be accounted explicitly by the classical model. Accordingly, in this paper, an analytical model is proposed to investigate the nonlinear relationship between relative velocity and material removal in BP based on the mutual interaction of the slurry, pad and workpiece among the BP interfaces with the micro-contact theory and the tribology theory. Good agreement between the predicted results of proposed model and the experimental data is obtained, and the nonlinear material removal with the change of relative velocity is attributed to the variation of the real contact area.
引用
收藏
页数:8
相关论文
共 43 条
  • [21] Material removal model considering influence of curvature radius in bonnet polishing convex surface
    Jianfeng Song
    Yingxue Yao
    Chinese Journal of Mechanical Engineering, 2015, 28 : 1109 - 1116
  • [22] An investigation of the effects of the tool path on the removal of material in polishing
    Tam, Hon-yuen
    Cheng, Haobo
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2010, 210 (05) : 807 - 818
  • [23] Material removal and tool path ripple error of bonnet polishing using pads with different groove patterns
    Chen, Hsuan-Chun
    Lin, Jyun-Ting
    Lo, Yu-Hsiang
    Liu, Chun-Wei
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2024, 132 (11-12) : 5895 - 5905
  • [24] Experimental Investigation of Material Removal Characteristics in Silicon Chemical Mechanical Polishing
    Park, Boumyoung
    Jeong, Sukhoon
    Lee, Hyunseop
    Kim, Hyoungjae
    Jeong, Haedo
    Dornfeld, David A.
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (11)
  • [25] Influence of relative velocity and contact force between abrasive media and workpiece on material removal in gyro finishing
    Ohlert, Marius
    Bruessel, Fabian
    Prinz, Sebastian
    Barth, Sebastian
    Bergs, Thomas
    JOURNAL OF MANUFACTURING PROCESSES, 2022, 79 : 614 - 625
  • [26] Investigation on the Material Removal and Surface Generation of a Single Crystal SiC Wafer by Ultrasonic Chemical Mechanical Polishing Combined with Ultrasonic Lapping
    Hu, Yong
    Shi, Dong
    Hu, Ye
    Zhao, Hongwei
    Sun, Xingdong
    MATERIALS, 2018, 11 (10)
  • [27] Modeling and experimental study on the material removal in the velocity-dwell-mode polishing process
    Zhao, J. (jzhao@jlu.edu.cn), 1600, Chinese Mechanical Engineering Society (50): : 173 - 181
  • [28] An Investigation of Effect of Stand-Off Distance on the Material Removal Characteristics and Surface Generation in Fluid Jet Polishing
    Wang C.J.
    Cheung C.F.
    Ho L.T.
    Loh Y.M.
    Nanomanufacturing and Metrology, 2020, 3 (02) : 112 - 122
  • [29] Investigation of material removal in vibration polishing of NiCo alloys with millimetre-sized tools
    Riemer, Oltmann
    Elsner-Doerge, Frederik
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2017, 92 (9-12) : 3117 - 3122
  • [30] Experimental Investigation and Modeling of Friction Coefficient and Material Removal During Optical Glass Polishing
    Raj Kumar Pal
    Manoj Kumar
    Vinod Karar
    Arabian Journal for Science and Engineering, 2023, 48 : 3255 - 3268