Research development of silicon MEMS gyroscopes: a review

被引：103

作者：

Guo Zhanshe ^{[1
,2
]}

Cheng Fucheng ^{[1
,2
]}

Li Boyu ^{[1
,2
]}

Cao Le ^{[1
,2
]}

Lu Chao ^{[1
,2
]}

Song Ke ^{[1
,2
]}

机构：

[1] Beihang Univ, Sch Instrument Sci & Optoelect Engn, Beijing 100191, Peoples R China

[2] Beihang Univ, State Key Lab Virtual Real Technol & Syst, Beijing 100191, Peoples R China

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2015年 / 21卷 / 10期

关键词：

MATERIALS ISSUES; BEAM; PERFORMANCE; VIBRATIONS; SYSTEM; TEMPERATURE; FREQUENCIES; SENSORS; MASS;

D O I：

10.1007/s00542-015-2645-x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micro-electromechenical Systems (MEMS) gyroscope is widely used in many occasions to measure the angular speed of the moving objects and attracts the attentions of many research institutions all over the world. This kind of sensor possesses the advantages of high degree of integration, low cost and consumption of power. This paper first introduces the research development of silicon MEMS gyroscope since eighties of last century; the researches of many institutions such as Draper Laboratory and UC Berkeley are mentioned and different design principles, control methods and structures are presented. This review then presents the key theories and technologies of the sensor and some research results of them. In additional, some recent new applications of MEMS gyroscope are also been introduced in this paper such as wearable motion capture system and micro inertial measurement unit. Finally, according to the review, some views of silicon MEMS gyroscope and its future prospects are put forwarded.

引用

页码：2053 / 2066

页数：14

共 59 条

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[2]

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[3]

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