Selective stiffening for producing motion conversion mechanisms

被引：6

作者：

Hotzen, Inbar ^{[1
]}

Ternyak, Orna ^{[1
]}

Shmulevich, Shai ^{[1
]}

Elata, David ^{[1
]}

机构：

[1] Technion Israel Inst Technol, IL-32000 Haifa, Israel

来源：

28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷

关键词：

Motion conversion; Out-of-plane motion; Actuators; FABRICATION; PHASE;

D O I：

10.1016/j.proeng.2014.11.534

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present a novel motion conversion mechanism which is fully compatible with standard mass-fabrication micromachining. The new mechanism is designed to linearly convert in-plane motion induced by electrostatic comb-drive actuators, to out-of-plane motion. The conversion mechanism is constructed from pairs of beams with two different heights. Motion conversion is achieved by fastening these beams together using a small number of rigid connectors. The rigid connectors stiffen the structure in-plane response, but induce an out-of-plane motion. We fabricated new test devices and demonstrated parallel out-of-plane motion of a flat stage. (C) 2014 The Authors. Published by Elsevier Ltd.

引用

页码：1589 / 1592

页数：4

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