Short-range order, large-scale potential fluctuations, and photoluminescence in amorphous SiNx

被引:31
作者
Gritsenko, VA [1 ]
Gritsenko, DV
Novikov, YN
Kwok, RWM
Bello, I
机构
[1] Russian Acad Sci, Inst Semicond Phys, Siberian Div, Novosibirsk 630090, Russia
[2] Chinese Univ Hong Kong, Dept Chem, Shatin, Hong Kong, Peoples R China
[3] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
关键词
D O I
10.1134/1.1757676
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The short-range order and electron structure of amorphous silicon nitride SiNx (x < 4/3) have been studied by a combination of methods including high-resolution X-ray photoelectron spectroscopy. Neither random bonding nor random mixture models can adequately describe the structure of this compound. An intermediate model is proposed, which assumes giant potential fluctuations for electrons and holes, caused by inhomogeneities in the local chemical composition. The characteristic scale of these fluctuations for both electrons and holes is about 1.5 eV. The photoluminescence in SiNx is interpreted in terms of the optical transitions between quantum states of amorphous silicon clusters. (C) 2004 MAIK "Nauka/Interperiodica".
引用
收藏
页码:760 / 769
页数:10
相关论文
共 48 条
[1]  
BOLOTIN VP, 1990, DOKL AKAD NAUK SSSR+, V310, P114
[2]   QUANTUM WELL MODEL OF HYDROGENATED AMORPHOUS-SILICON [J].
BRODSKY, MH .
SOLID STATE COMMUNICATIONS, 1980, 36 (01) :55-59
[3]   CONFIGURATIONAL STATISTICS IN A-SIXNYHZ ALLOYS - A QUANTITATIVE BONDING ANALYSIS [J].
BUSTARRET, E ;
BENSOUDA, M ;
HABRARD, MC ;
BRUYERE, JC ;
POULIN, S ;
GUJRATHI, SC .
PHYSICAL REVIEW B, 1988, 38 (12) :8171-8184
[4]   INTRINSIC-DEFECT PHOTO-LUMINESCENCE IN AMORPHOUS SIO2 [J].
GEE, CM ;
KASTNER, M .
PHYSICAL REVIEW LETTERS, 1979, 42 (26) :1765-1769
[5]   Optical absorption and photoluminescence properties of α-Si1-xNx:H films deposited by plasma-enhanced CVD [J].
Giorgis, F ;
Vinegoni, C ;
Pavesi, L .
PHYSICAL REVIEW B, 2000, 61 (07) :4693-4698
[6]   Optical microcavities based on amorphous silicon-nitride Fabry-Perot structures [J].
Giorgis, F .
APPLIED PHYSICS LETTERS, 2000, 77 (04) :522-524
[7]  
Gritsenko V. A., 1993, ATOMIC ELECT STRUCTU
[8]  
Gritsenko V.A, 1987, MICROELECTRONICS SOV, V16, P42
[9]  
Gritsenko V.A., 1988, SILICON NITRIDE ELEC
[10]   A new low voltage fast SONOS memory with high-k dielectric [J].
Gritsenko, VA ;
Nasyrov, KA ;
Novikov, YN ;
Aseev, AL ;
Yoon, SY ;
Lee, JW ;
Lee, EH ;
Kim, CW .
SOLID-STATE ELECTRONICS, 2003, 47 (10) :1651-1656