Electrical properties of p-type ZnTe thin films by immersion in Cu solution

被引:27
作者
Lastra, G. [1 ]
Luque, P. A. [1 ]
Quevedo-Lopez, M. A. [2 ]
Olivas, A. [3 ]
机构
[1] Ctr Nanociencias & Nanotechnol UNAM, PCelM, Ensenada 22860, Baja California, Mexico
[2] Univ Texas Dallas, Dept Mat Sci & Engn, Richardson, TX 75080 USA
[3] Ctr Nanociencias & Nanotechnol UNAM, Ensenada 22860, Baja California, Mexico
关键词
ZnTe; Thin films; Cu doping; Thin-film transistor; ZINC TELLURIDE; DOPED ZNTE; DEPOSITION;
D O I
10.1016/j.matlet.2014.04.058
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
ZnTe thin films were deposited on SiO2 substrate by pulsed-laser deposition (PLD) at room temperature. The ZnTe films were immersed in different concentrations of Cu(NO3)(2)-3H(2)O solutions for 1 min, then heated at 200 and 300 degrees C, both temperatures for 10 min in a N-2 atmosphere. The X-ray diffraction (XRD) showed the hexagonal and orthorhombic ZnTe phases when the copper-doped films were heated at 200 and 300 degrees C for 10 min respectively. The films immersed in 15 and 60 mg of Cu(NO3)(2)-H2O solutions had similar values of sheet resistance similar to 10(4) Omega/square, resistivity similar to 10(-1) Omega cm, specific contact resistance similar to 10(-4) Omega cm(2), and hall mobility 5 cm(2)/V s. Also, the copper-doped conditions were used to dope the source and drain bias to make a thin-film transistor of ZnTe (TFT) by photolithography. (C) 2014 Elsevier BM. All rights reserved.
引用
收藏
页码:271 / 273
页数:3
相关论文
共 23 条
  • [1] Properties of copper-doped ZnTe thin films by immersion in Cu solution
    Aqili, AKS
    Maqsood, A
    Ali, Z
    [J]. APPLIED SURFACE SCIENCE, 2001, 180 (1-2) : 73 - 80
  • [2] Characterization of Te/Zn/Te ... Multilayers deposited by RF-sputtering
    Bellakhder, H
    Debbagh, F
    Outzourhit, A
    Bennouna, A
    Brunel, M
    Ameziane, EL
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 45 (04) : 361 - 368
  • [3] Pulsed laser deposition of ZnTe thin films
    Bhumia, S
    Bhattacharya, P
    Bose, DN
    [J]. MATERIALS LETTERS, 1996, 27 (06) : 307 - 311
  • [4] DEPOSITION AND PROPERTIES OF ZINC TELLURIDE AND CADMIUM ZINC TELLURIDE FILMS
    CHU, TL
    CHU, SS
    FIRSZT, F
    HERRINGTON, C
    [J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (04) : 1259 - 1263
  • [5] Properties of zinc telluride containing impurities introduced during spray pyrolysis
    DeMerchant, J
    Cocivera, M
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1996, 143 (12) : 4054 - 4059
  • [6] Structural and surface analysis of thin-film ZnTe formed with pulsed-laser deposition
    Erlacher, Artur
    Lukaszew, Alejandra R.
    Jaeger, Herbert
    Ullrich, Bruno
    [J]. SURFACE SCIENCE, 2006, 600 (18) : 3762 - 3765
  • [7] The structural, optical, and electrical properties of vacuum evaporated Cu-doped ZnTe polycrystalline thin films
    Feng, L
    Mao, D
    Tang, J
    Collins, RT
    Trefny, JU
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (09) : 1422 - 1427
  • [8] DEVELOPMENT OF RF-SPUTTERED, CU-DOPED ZNTE FOR USE AS A CONTACT INTERFACE LAYER TO P-CDTE
    GESSERT, TA
    MASON, AR
    REEDY, RC
    MATSON, R
    COUTTS, TJ
    SHELDON, P
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1995, 24 (10) : 1443 - 1449
  • [9] Gessert TA, 1997, P 26 IEEE PHOT SPEC, P293
  • [10] ION-BEAM SPUTTER DEPOSITED ZINC TELLURIDE FILMS
    GULINO, DA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 509 - 513