Growth of GaN on nano-crystalline diamond substrates

被引:25
作者
van Dreumel, G. W. G. [1 ,2 ]
Buijnsters, J. G. [1 ]
Bohnen, T. [2 ]
ter Meulen, J. J. [1 ]
Hageman, P. R. [2 ]
van Enckevort, W. J. P. [3 ]
Vlieg, E. [2 ,3 ]
机构
[1] Radboud Univ Nijmegen, IMM Dept Appl Mol Phys, NL-6525 AJ Nijmegen, Netherlands
[2] Radboud Univ Nijmegen, IMM Dept Appl Mat Sci, NL-6525 AJ Nijmegen, Netherlands
[3] Radboud Univ Nijmegen, IMM Dept Solid State Chem, NL-6525 AJ Nijmegen, Netherlands
关键词
Synthetic diamond; Gallium nitride (GaN); Heterostructures; Chemical vapour deposition (CVD); CHEMICAL-VAPOR-DEPOSITION; NUCLEATION;
D O I
10.1016/j.diamond.2009.01.027
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study GaN has been grown on nano-crystalline diamond substrates utilizing metal-organic chemical vapour deposition (MOCVD). It is shown that the growth of closed GaN films onto synthetic diamond substrates is feasible, when applying the correct buffer layer and growth parameters. XRD measurements showed that the GaN formed is of wurzite structure and polycrystalline, but the high intensity of the (0002) diffraction peak indicates a preferential crystallite orientation. This preferred 100011 orientation was confirmed by SEM analysis. The optical quality of the deposited GaN layer was investigated using cathodoluminescence and showed a large yellow luminescence peak. This work comprises a first step in preparing heterogeneous layers and GaN devices with a diamond heat sink as a substrate, facilitating the thermal management of these devices. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:1043 / 1047
页数:5
相关论文
共 18 条
[1]   POLARIZED RAMAN-SPECTRA IN GAN [J].
AZUHATA, T ;
SOTA, T ;
SUZUKI, K ;
NAKAMURA, S .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1995, 7 (10) :L129-L133
[2]  
Birkle U, 1999, MRS INTERNET J N S R, V4
[3]  
BUIJNSTERS JG, DIAMOND REL IN PRESS
[4]   Origin of the 1150-cm-1 Raman mode in nanocrystalline diamond -: art. no. 121405 [J].
Ferrari, AC ;
Robertson, J .
PHYSICAL REVIEW B, 2001, 63 (12)
[5]   GaN growth on single-crystal diamond substrates by metalorganic chemical vapour deposition and hydride vapour deposition [J].
Hageman, PR ;
Schermer, JJ ;
Larsen, PK .
THIN SOLID FILMS, 2003, 443 (1-2) :9-13
[6]   Properties of GaN and related compounds studied by means of Raman scattering [J].
Harima, H .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2002, 14 (38) :R967-R993
[7]   Understanding GaN nucleation layer evolution on sapphire [J].
Koleske, DD ;
Coltrin, ME ;
Cross, KC ;
Mitchell, CC ;
Allerman, AA .
JOURNAL OF CRYSTAL GROWTH, 2004, 273 (1-2) :86-99
[8]   RAMAN-SCATTERING FROM LO PHONON-PLASMON COUPLED MODES IN GALLIUM NITRIDE [J].
KOZAWA, T ;
KACHI, T ;
KANO, H ;
TAGA, Y ;
HASHIMOTO, M ;
KOIDE, N ;
MANABE, K .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (02) :1098-1101
[9]   XRD, XPS, SEM, PL and Raman scattering analysis of synthesised GaN powder [J].
Kumar, MS ;
Kumar, J .
MATERIALS CHEMISTRY AND PHYSICS, 2003, 77 (02) :341-345
[10]   Studies of electron trapping in GaN doped with carbon [J].
Lopatiuk, Olena ;
Chernyak, Leonid ;
Feldman, Yishai ;
Gartsman, Konstantin .
THIN SOLID FILMS, 2007, 515 (10) :4365-4368