In-depth comparison of conventional glass cutting technologies with laser-based methods by volumetric scribing using Bessel beam and rear-side machining

被引:31
作者
Dudutis, Juozas [1 ]
Pipiras, Jokubas [1 ]
Stonys, Rokas [1 ]
Daknys, Eimantas [1 ]
Kilikevicius, Arturas [2 ]
Kasparaitis, Albinas [3 ]
Raciukaitis, Gediminas [1 ]
Gecys, Paulius [1 ]
机构
[1] Ctr Phys Sci & Technol, Savanoriu Ave 231, LT-02300 Vilnius, Lithuania
[2] Vilnius Gediminas Tech Univ, J Basanaviciaus St 28, LT-03224 Vilnius, Lithuania
[3] Precizika Metrol, Zirmunu St 139, LT-09120 Vilnius, Lithuania
来源
OPTICS EXPRESS | 2020年 / 28卷 / 21期
关键词
FLEXURAL STRENGTH; FUSED-SILICA; SEPARATION; FATIGUE;
D O I
10.1364/OE.402567
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
With the development of industrial lasers and novel glass processing techniques, which offer high speed, quality and precision, this becomes an attractive alternative to conventional methods, such as mechanical scribing and cleaving, diamond saw and waterjet cutting, commonly used in the industry. However, the emerging techniques lack thorough validation with respect to well-established methods. To this end, we present a detailed comparison of different glass cutting methods, taking into account surface quality, side-wall roughness, residual stresses and flexural strength. In addition, samples were examined after fracture, and the flexural strength was estimated according to the quarter elliptical corner flaws, which were the main reason of glass failure. Two laser glass processing techniques were investigated - the rear-side glass processing with tightly focused nanosecond laser pulses and sub-nanosecond laser volumetric scribing with asymmetrical Bessel beam. Results were compared to mechanical scribing and breaking, diamond saw and waterjet cutting. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:32133 / 32151
页数:19
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