Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

被引：0
作者：
Churaev, Mikhail [1 ]
Hoenl, Simon [2 ]
Wang, Rui Ning [1 ]
Moehl, Charles [2 ]
Liu, Tianyi [1 ]
Skehan, J. Connor [1 ]
Riemensberger, Johann [1 ]
Caimi, Daniele [2 ]
Liu, Junqiu [1 ]
Seidler, Paul [2 ]
Kippenberg, Tobias J. [1 ]
机构：
[1] Swiss Fed Inst Technol Lausanne EPFL, CH-1015 Lausanne, Switzerland
[2] IBM Res Zurich, CH-8803 Ruschlikon, Switzerland
来源：
2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2020年
基金：
瑞士国家科学基金会; 欧盟地平线“2020”;
关键词：
MODULATOR; SILICON;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well as integrated travelling wave EO modulators. (c) 2020 The Author(s)
引用
收藏
页数：2
相关论文
共 50 条
  • [41] Ultrafast saturable absorption dynamics in hybrid graphene/Si3N4 waveguides
    Demongodin, Pierre
    El Dirani, Houssein
    Lhuillier, Jeremy
    Crochemore, Romain
    Kemiche, Malik
    Wood, Thomas
    Callard, Segolene
    Rojo-Romeo, Pedro
    Sciancalepore, Corrado
    Grillet, Christian
    Monat, Christelle
    APL PHOTONICS, 2019, 4 (07)
  • [42] All-Fiber Micro-Ring Resonator Based p-Si/n-ITO Heterojunction Electro-Optic Modulator
    Zhu, Yihan
    Wang, Ziqian
    Chen, Xing
    Zhu, Honghai
    Zhou, Lizhuo
    Zhou, Yujie
    Liu, Yi
    Zhang, Yule
    Tian, Xilin
    Sun, Shuo
    Li, Jianqing
    Jiang, Ke
    Zhang, Han
    Wang, Huide
    MATERIALS, 2025, 18 (02)
  • [43] Electrochemical Properties of Nitride Phases in the Si3N4–Ca3N2and Si3N4–AlN–Ca3N2Systems
    S. F. Pal'guev
    R. P. Lesunova
    E. I. Burmakin
    E. S. Korovenkova
    Inorganic Materials, 2001, 37 : 684 - 687
  • [44] Investigation of Si and Ge growth on Si3N4/Si
    Wang, L
    Wang, XS
    Tang, JC
    Cue, N
    MATERIALS CHARACTERIZATION, 2002, 48 (2-3) : 189 - 194
  • [45] IN-SITU PROCESSED SI3N4 WHISKERS IN THE SYSTEM BARIUM ALUMINOSILICATE-SI3N4
    FREITAG, DW
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1995, 195 (1-2): : 197 - 205
  • [46] Revealing intrinsic electro-optic effect in single domain Pb(Zr, Ti)O3 thin films
    Kondo, Shinya
    Yamada, Tomoaki
    Yoshino, Masahito
    Teranishi, Takashi
    Kishimoto, Akira
    Nagasaki, Takanori
    APPLIED PHYSICS LETTERS, 2021, 119 (10)
  • [47] Enhanced Electro-Optic Coefficients in Single-Crystalline BaTiO3 Thin Films Enabled by Domain Alignment
    Wen, Yiyang
    Cao, Yilin
    Chen, Haisheng
    Du, Xiaona
    Guo, Jiaxing
    Shen, Jiaying
    Zhang, Fan
    Bian, Taiyu
    An, Yu
    Ren, Hongda
    Wu, Zhenping
    Liu, Weiwei
    Zhang, Yang
    ADVANCED OPTICAL MATERIALS, 2024, 12 (15)
  • [48] Guided-wave electro-optic characterization of BaTiO3 thin films using the prism coupling technique
    Leroy, Floriane
    Rousseau, Anthony
    Payan, Sandrine
    Dogheche, Elhadj
    Jenkins, David
    Decoster, Didier
    Maglione, Mario
    OPTICS LETTERS, 2013, 38 (07) : 1037 - 1039
  • [49] Plasmonic Stripes in Aqueous Environment Co-Integrated With Si3N4 Photonics
    Dabos, George
    Ketzaki, Dimitra
    Manolis, Athanasios
    Markey, Laurent
    Weeber, Jean Claude
    Dereux, Alain
    Giesecke, Anna Lena
    Porschatis, Caroline
    Chmielak, Bartos
    Tsiokos, Dimitris
    Pleros, Nikos
    IEEE PHOTONICS JOURNAL, 2018, 10 (01):
  • [50] Integrated waveguide coupled Si3N4 resonators in the ultrahigh-Q regime
    Spencer, Daryl T.
    Bauters, Jared F.
    Heck, Martijn J. R.
    Bowers, John E.
    OPTICA, 2014, 1 (03): : 153 - 157
12345