Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

被引：0
作者：
Churaev, Mikhail [1 ]
Hoenl, Simon [2 ]
Wang, Rui Ning [1 ]
Moehl, Charles [2 ]
Liu, Tianyi [1 ]
Skehan, J. Connor [1 ]
Riemensberger, Johann [1 ]
Caimi, Daniele [2 ]
Liu, Junqiu [1 ]
Seidler, Paul [2 ]
Kippenberg, Tobias J. [1 ]
机构：
[1] Swiss Fed Inst Technol Lausanne EPFL, CH-1015 Lausanne, Switzerland
[2] IBM Res Zurich, CH-8803 Ruschlikon, Switzerland
来源：
2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2020年
基金：
瑞士国家科学基金会; 欧盟地平线“2020”;
关键词：
MODULATOR; SILICON;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well as integrated travelling wave EO modulators. (c) 2020 The Author(s)
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页数：2
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