vanadium dioxide thin films;
reactive ion sputtering;
strong laser radiation;
D O I:
10.1016/j.sna.2004.03.018
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
This paper presents a method to make vanadium dioxide (VO2) crystallites on silicon substrates by reactive ion beam sputtering. The thickness of the thin film is about 100 nm. The transmittance of the semiconducting phase VO2 is about 54% and it is reduced to as low as 3% in metal phase at the wavelength of 10.6 mum. And the ratio of the transmittance of these two states is measured being 18:1. When a destructive light intensity is above 0.85 W/cm(2) at 10.6 mum, most of the light could be reflected by the thin film, thus the sensitive infrared detector is protected from strong laser radiation. (C) 2004 Elsevier B.V. All rights reserved.
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Kuman, RTR
Karunagaran, B
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Karunagaran, B
Mangalaraj, D
论文数: 0引用数: 0
h-index: 0
机构:
Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, IndiaBharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Mangalaraj, D
Narayandass, SK
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Narayandass, SK
Manoravi, P
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Manoravi, P
Joseph, M
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Joseph, M
Gopal, V
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Kumar, RTR
Karunagaran, B
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Karunagaran, B
Mangalaraj, D
论文数: 0引用数: 0
h-index: 0
机构:
Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, IndiaBharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Mangalaraj, D
Narayandass, SK
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Narayandass, SK
Manoravi, P
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Manoravi, P
Joseph, M
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Joseph, M
Gopal, V
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Gopal, V
Madaria, RK
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Madaria, RK
Singh, JP
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
机构:
UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB, DIV APPL SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY LAWRENCE BERKELEY LAB, DIV APPL SCI, BERKELEY, CA 94720 USA
LAMPERT, CM
[J].
SOLAR ENERGY MATERIALS,
1984,
11
(1-2):
: 1
-
27
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Kuman, RTR
Karunagaran, B
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Karunagaran, B
Mangalaraj, D
论文数: 0引用数: 0
h-index: 0
机构:
Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, IndiaBharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Mangalaraj, D
Narayandass, SK
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Narayandass, SK
Manoravi, P
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Manoravi, P
Joseph, M
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Joseph, M
Gopal, V
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Kumar, RTR
Karunagaran, B
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Karunagaran, B
Mangalaraj, D
论文数: 0引用数: 0
h-index: 0
机构:
Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, IndiaBharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Mangalaraj, D
Narayandass, SK
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Narayandass, SK
Manoravi, P
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Manoravi, P
Joseph, M
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Joseph, M
Gopal, V
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Gopal, V
Madaria, RK
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
Madaria, RK
Singh, JP
论文数: 0引用数: 0
h-index: 0
机构:Bharathiar Univ, Dept Phys, Thin Film Lab, Coimbatore 641046, Tamil Nadu, India
机构:
UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB, DIV APPL SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY LAWRENCE BERKELEY LAB, DIV APPL SCI, BERKELEY, CA 94720 USA
LAMPERT, CM
[J].
SOLAR ENERGY MATERIALS,
1984,
11
(1-2):
: 1
-
27