Cavitation erosion resistance of NiTi thin films produced by Filtered Arc Deposition

被引：34

作者：

Yang, L. M. ^{[1
]}

Tieu, A. K. ^{[1
]}

Dunne, D. P. ^{[1
]}

Huang, S. W. ^{[1
]}

Li, H. J. ^{[1
]}

Wexler, D. ^{[1
]}

Jiang, Z. Y. ^{[1
]}

机构：

[1] Univ Wollongong, Sch Mech Mat & Mechatron Engn, Wollongong, NSW 2522, Australia

来源：

WEAR | 2009年 / 267卷 / 1-4期

关键词：

NiTi thin films; Filtered Arc Deposition System; Substrate temperature; Cavitation erosion; Pseudoelasticity; SUS304; STAINLESS-STEEL; SHAPE-MEMORY ALLOYS; MARTENSITIC TRANSFORMATIONS; TINI; EVAPORATION;

D O I：

10.1016/j.wear.2009.01.035

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

In this study, NiTi thin films were obtained by using a Filtered Arc Deposition System (FADS). X-ray diffraction (XRD), Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS), Transmission Electron Microscopy (TEM) and Differential Scanning Calorimetry (DSC) were used to investigate the effect of substrate temperature (130-600 degrees C) on the structures and properties of NiTi thin films. It was found that FADS produced dense and homogenous films. Higher substrate temperatures resulted in crystalline thin films dominated by the parent phase (132). The cavitation erosion resistance of the films was assessed by using ASTM Test Method G32. It was found that NiTi thin films showed superior cavitation erosion resistance compared with 316 austenitic stainless steel. The improved cavitation erosion resistance was attributed to the recoverable deformation associated with pseudoelasticity of the NiTi thin film. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：233 / 243

页数：11

共 22 条

[1] Recent developments in vacuum arc deposition [J].

Boxman, RL .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 2001, 29 (05) :762-767

[2] Fabrication of TiNi shape memory alloy thin films by pulsed-laser deposition [J].

Chen, XY ;

Lu, YF ;

Ren, ZM ;

Zhu, S .

JOURNAL OF MATERIALS RESEARCH, 2002, 17 (02) :279-283

[3]

DAVIS JR, 1987, METALS HDB AM SOC MA, V13, P311

[4]

FU Y, 2004, SENSOR ACTUATOR, V112, P396

[5]

HAMMITT FG, 1975, METALS HDB, V10, P160

[6] SHAPE-MEMORY THIN-FILM OF TI-NI FORMED BY SPUTTERING [J].

ISHIDA, A ;

TAKEI, A ;

MIYAZAKI, S .

THIN SOLID FILMS, 1993, 228 (1-2) :210-214

[7] Martensitic transformations and shape memory effect in Ti-Ni sputter-deposited thin films [J].

Kawamura, Y ;

Gyobu, A ;

Horikawa, H ;

Saburi, T .

JOURNAL DE PHYSIQUE IV, 1995, 5 (C8) :683-688

[8] Direct transmission electron microscopy observations of martensitic transformations in Ni-rich NiTi single crystals during in situ cooling and straining [J].

Kroeger, A. ;

Dziaszyk, S. ;

Frenzel, J. ;

Somsen, Ch. ;

Dlouhy, A. ;

Eggeler, G. .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2008, 481 (452-456) :452-456

[9] A comparison of slurry erosion characteristics of TiNi shape memory alloys and SUS304 stainless steel [J].

Lin, HC ;

Wu, SK ;

Yeh, CH .

WEAR, 2001, 249 (07) :557-565

[10] Flash evaporation of TiNi shape memory thin film for microactuators [J].

Makino, E ;

Uenoyama, M ;

Shibata, T .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 71 (03) :187-192

← 1 2 3 →