Micro ultrasonic welding:: joining of chemically inert polymer microparts for single material fluidic components and systems

被引：44

作者：

Truckenmueller, R.

Cheng, Y.

Ahrens, R.

Bahrs, H.

Fischer, G.

Lehmann, J.

机构：

[1] Forschungszentrum Karlsruhe, Inst Mikrostrukturtechn, D-76021 Karlsruhe, Germany

[2] Fachhsch Techn Esslingen, Esslingen, Germany

[3] Herrmann Ultraschalltechn, Karlsbad, Germany

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 10-11期

关键词：

Welding; PMMA; Laser Welding; Single Material; Welding Machine;

D O I：

10.1007/s00542-006-0136-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel powerful micro joining process-the ultrasonic welding of real micro polymer parts. It seems to be especially suited for the manufacturing of single material, chemically inert plastic microfluidic components and systems for applications in the field of pharmaceutics, biotechnology and life sciences as well as for high temperature polymer fluidic microdevices. The performance of this 'micro ultrasonic welding' process, alone using a pneumatic standard ultrasonic welding machine, is demonstrated by the example of covering and sealing microchannels and assembling a piezo-driven micropump.

引用

页码：1027 / 1029

页数：3