Shape adaptive grinding of CVD silicon carbide

被引：58

作者：

Beaucamp, Anthony ^{[1
]}

Namba, Yoshiharu ^{[1
]}

Combrinck, Herman ^{[2
]}

Charlton, Phillip ^{[3
]}

Freeman, Richard ^{[3
]}

机构：

[1] Chubu Univ, Dept Mech Engn, Kasugai, Aichi 487, Japan

[2] Cranfield Precis, Bedford, England

[3] Zeeko Ltd, Coalville, Leics, England

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2014年 / 63卷 / 01期

基金：

日本学术振兴会;

关键词：

Ultra-precision; Grinding; Silicon carbide;

D O I：

10.1016/j.cirp.2014.03.019

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Because of the direct relationship between removal rate and surface roughness in conventional grinding, ultra-precision finishing of hard coatings produced by chemical vapour deposition (CVD) usually involves several process steps with fixed and loose abrasives. In this paper, an innovative shape adaptive grinding (SAG) tool is introduced that allows finishing of CVD silicon carbide with roughness below 0.4 nm Ra and high removal rates up-to 100 mm(3)/min. The SAG tool elastically complies with freeform surfaces, while rigidity at small scales allows grinding to occur. Since material removal is time dependent, this process can improve form error iteratively through feed moderation. (C) 2014 CIRP.

引用

页码：317 / 320

页数：4

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