Rotating symmetrical piezoelectric microactuators for magnetic head drives

被引：8
作者：
Kurihara, Kazuaki
Hida, Masaharu
Umemiya, Shigeyoshi
Kondo, Masao
Koganezawa, Shinji
机构：
[1] Fujitsu Labs Ltd, Devices & Mat Res Labs, Atsugi, Kanagawa 2430197, Japan
[2] Fujitsu Ltd, HDD Dev Dept, Kawasaki, Kanagawa 2118588, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 9B期
关键词：
PNN-PT-PZ; microactuator; magnetic disk drive; piezoelectric; HARD-DISK DRIVE; ACTUATOR; DENSITY; SYSTEM;
D O I：
10.1143/JJAP.45.7471
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A unique piezoelectric microactuator for the head-slider drive dual-stage actuator systems in magnetic disk drives has been developed. This microactuator is based on a rotating symmetrical structure and a symmetrical operation. The piezoelectric actuator elements used in the system have a simple rectangular multilayered structure. A prototype model with pico slider and head suspension has been tested to demonstrate 0.86 mu m displacement at a dc applied voltage of 30V and observed main resonant frequency of over 20kHz. No fluctuation in flying height was observed.
引用
收藏
页码：7471 / 7474
页数：4
相关论文
共 15 条
  • [1] Piezoelectric microactuator for dual stage control
    Evans, RB
    Griesbach, JS
    Messner, WC
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (02) : 977 - 982
  • [2] FAN LS, 1995, IEEE T IND ELECTRON, V42, P222
  • [3] Transverse mode electrostatic microactuator for MEMS-based HDD slider
    Imamura, T
    Koshikawa, T
    Katayama, M
    [J]. NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 216 - 221
  • [4] IMAMURA T, 1993, ASME PRESS SERIES, V5, P119
  • [5] Dual-stage actuator system for magnetic disk drives using a shear mode piezoelectric microactuator
    Koganezawa, S
    Uematsu, Y
    Yamada, T
    Nakano, H
    Inoue, J
    Suzuki, T
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (02) : 988 - 992
  • [6] Koganezawa S, 2001, FUJITSU SCI TECH J, V37, P212
  • [7] Shear mode piezoelectric microactuator for magnetic disk drives
    Koganezawa, S
    Uematsu, Y
    Yamada, T
    Nakano, H
    Inoue, J
    Suzuki, T
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (04) : 1910 - 1912
  • [8] A flexural piggyback milli-actuator for over 5 Gbit/in(2) density magnetic recording
    Koganezawa, S
    Takaishi, K
    Mizoshita, Y
    Uematsu, Y
    Yamada, T
    Hasegawa, S
    Ueno, T
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (05) : 3908 - 3910
  • [9] Piezoelectric properties of PbNi1/3Nb2/3O3-PbTiO3-PbZrO3 ceramics near the MPB
    Kondo, M
    Hida, M
    Tsukada, M
    Kurihara, K
    Kamehara, N
    [J]. JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1997, 105 (08) : 719 - 721
  • [10] Piezoelectric microactuators for use in magnetic disk drives
    Kurihara, K
    Hida, M
    Umemiya, S
    Koganezawa, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (9B): : 6725 - 6727
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