Characterization of (1120) textured ZnO films fabricated by RF magnetron sputtering

Using a conventional RF magnetron sputtering system, we have obtained two types of ZnO films on various kinds of substrate. One is a film with the c-axes of crystallites unidirectionally aligned in the substrate plane {(11 (2) over bar0) textured film}. The other is a film with c-axes parallel and perpendicular to the plane (mixed texture film). The former is expected to realize a shear wave transducer on the surfaces of various materials. The alignment of c-axes of crystallites in the plane was then carefully investigated by the X-ray pole figure analysis. The elastic anisotropy in the film has been successfully measured by the Brillouin scattering method. The (11 (2) over bar0) textured film did not excite the elastic waves; however, comparatively strong shear waves were actually excited by the mixed texture film.