Surface birefringence of regular periodic surface structures produced on glass coated with an indium tin oxide film using a low-fluence femtosecond laser through a cylindrical lens

被引:19
作者
Chen, Long [1 ,2 ]
Cao, Kaiqiang [1 ]
Liu, Jukun [1 ]
Jia, Tianqing [1 ,2 ]
Li, Yanli [1 ]
Zhang, Shian [1 ]
Feng, Donghai [1 ]
Sun, Zhenrong [1 ]
Qiu, Jianrong [3 ]
机构
[1] East China Normal Univ, Sch Phys & Elect Sci, State Key Lab Precis Spect, Shanghai 200062, Peoples R China
[2] Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Peoples R China
[3] Zhejiang Univ, State Key Lab Opt Instrumentat, Hangzhou 310027, Peoples R China
基金
中国国家自然科学基金;
关键词
FORM-BIREFRINGENCE; SILICA; FABRICATION; RIPPLES; WAVE;
D O I
10.1364/OE.402037
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Large-area regular laser-induced periodic surface structures (LIPSSs) with a birefringence effect were efficiently produced on a glass surface coated with an indium tin oxide (ITO) film, through irradiation by a femtosecond laser (800 nm, 50 fs, 3 mJ, 1 kHz) focused with a cylindrical lens. The laser fluence of 0.44 J/cm(2) on the coated glass was only one-tenth of that on bare glass, which significantly reduced the thermal effect. Moreover, regular LIPSSs with a period as short as 1(X) nm could be produced efficiently. The retardance of the fabricated LIPSSs was measured to be up to 44 nm, which is eight times that of LIPSSs fabricated on bare glass. The mechanisms of such a large difference of retardance were studied by measuring the nanostructures and the concentration of In3+ ions on the cross section of nano-corrugated surface layer on bare glass and ITO-coated glass. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:30094 / 30106
页数:13
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