Fabrication and characterization of microlenses realized by a modified LIGA process

被引：48

作者：

Ruther, P ^{[1
]}

Gerlach, B ^{[1
]}

Gottert, J ^{[1
]}

Ilie, M ^{[1
]}

Mohr, J ^{[1
]}

Muller, A ^{[1
]}

Ossmann, C ^{[1
]}

机构：

[1] INST MICROTECHNOL,BUCHAREST,ROMANIA

来源：

PURE AND APPLIED OPTICS | 1997年 / 6卷 / 06期

关键词：

D O I：

10.1088/0963-9659/6/6/006

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a fabrication technology for the creation of high-aperture polymer microlenses and their optical characterization both as single lenses and mounted in a micro-objective. The microlenses are made by the LIGA process (x-ray lithography, electroforming and moulding techniques), which is modified by an additional x-ray irradiation step and a melting process. The spherical lenses are realized by melting of PMMA micro-cylinders, which have been flood exposed in the additional synchrotron irradiation step. For the cost-effective replication by hot embossing a moulding tool is made out of the primary PMMA lenses. As the focus of interest is the development of a micro-objective for medical applications, we concentrated on lenses which have a front focal length of 700 and 1000 mu m and an equal outer diameter of 580 mu m, which is achieved by an additional lateral structuring.

引用

页码：643 / 653

页数：11