Fabrication of Surface Acoustic Wave wireless pressure sensor

被引：7
|
作者：
Hermelin, D. [1 ]
Daniaux, W. [1 ]
Ballandras, S. [1 ]
Belgacem, B. [2 ]
机构：
[1] FEMTO ST, UMR 6174, Dept Temps Frequence, 26 Chemin Epitaphe, F-25000 Besancon, France
[2] SENSeOR SAS, F-25000 Besancon, France
来源：
2009 JOINT MEETING OF THE EUROPEAN FREQUENCY AND TIME FORUM AND THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2 | 2009年
关键词：
component; SAW resonator; inhomogeneous stress distribution; quality factor; electrical impedance; pressure sensor;
D O I：
10.1109/FREQ.2009.5168149
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper deals with walk-through allowing to explain the electrical response of a surface acoustic wave (SAW) resonator under inhomogeneous stress. Act of pressure on a circular membrane where is put the resonator induces inhomogeneous stress and changes the resonance frequency and the quality factor of the resonator. This paper describes a developped model based on P-matrix approach allowing to explain the behavior of these two parameters.
引用
收藏
页码：96 / +
页数：2
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