A single chip, double channel thermal flow meter

被引：39

作者：

Bruschi, P. ^{[1
]}

Dei, M. ^{[1
]}

Piotto, M. ^{[2
]}

机构：

[1] Dipartimento Ingn Informaz, I-56122 Pisa, Italy

[2] CNR, IEIIT Pisa, I-56122 Pisa, Italy

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2009年 / 15卷 / 08期

关键词：

SENSOR;

D O I：

10.1007/s00542-008-0741-x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication and experimental characterization of a thermal flow meter, capable of detecting and measuring two independent gas flows with a single chip, is described. The innovative aspect of the sensor is the use of a plastic adapter, thermally sealed to the chip, to convey the gas flow only to the chip areas where the sensors are located. The packaging approach allowed placing two micrometric differential thermal anemometers, present on 4 x 4 mm(2) silicon chips, into distinct flow channels. The reduced spacing between the sensing structures required positioning of the latter on channel bends, introducing sensitivity reduction and response asymmetries with respect to single channel devices presented earlier. These effects are explained using fluid-dynamic simulations.

引用

页码：1179 / 1186

页数：8

共 13 条

[1] A compact package for integrated silicon thermal gas flow meters [J].