Photoetching and modification of poly(tetrafluoroethylene-co-hexafluoropropylene) polymer surfaces with vacuum UV radiation

被引:23
作者
Chen, JX
Tracy, D
Zheng, S
Xiaolua, L
Brown, S
VanDerveer, W
Entenberg, A
Vukanovic, V
Takacs, GA [1 ]
Egitto, FD
Matienzo, LJ
Emmi, F
机构
[1] Rochester Inst Technol, Dept Chem, Ctr Mat Sci & Engn, Rochester, NY 14623 USA
[2] Rochester Inst Technol, Dept Phys, Rochester, NY 14623 USA
[3] IBM Corp, Endicott Interconnect Technol Inc, Endicott, NY 13760 USA
关键词
photodegradation; FEP; UV; VUV; surface modification; radiation;
D O I
10.1016/S0141-3910(02)00339-7
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Films of poly(tetrafluoroethylene-co-hexafluoropropylene) (FEP) were exposed to radiation from 6.7 x 10(4) Pa He and Ar dc arc plasmas that were made to rotate inside of a graphite tube by the application of an auxiliary magnetic field. The films were covered with optical filters having different cut-off wavelengths to vary the vacuum ultraviolet (VUV) radiation that modified the fluoro-polymer surface. With arc currents of 7 A and sample temperatures up to 110 degreesC, the photoetch rate of FEP was ca. 50% higher than for PTFE. Consistent with results for PTFE, treated FEP showed the following: (1) contact angles that started to decrease in the wavelength region between 173 and 160 nm and continued to decrease with shorter wavelengths; (2) surface roughening; (3) defluorination of the surface with a slight increase in the atomic%C and formation of C-C bonds in the top 3-5 nm of the surface as detected by XPS analysis; and (4) incorporation of oxygen, presumably from reaction with oxygen in air. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:399 / 404
页数:6
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