Measuring system for radiation pulses from gas-puff laser-plasma source

The paper presents a measuring system of extreme ultraviolet radiation pulses (13.5 nm). The system is used for monitoring a gas-puff laser-plasma source constructed at the Institute of Optoelectronics. The radiation source and the system are used in metrology of EUV optics. The system consists of a detection head and a system of optical filters, which are housing in a special construction. Additional element of the measuring system is a special processing unit. The measuring system was used during investigations of the plasma-laser optimization. The results were comparable with the ones from a spectrograph and an Emon energy meter.