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Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Sensors, Georges Koehler Allee 103, D-79110 Freiburg, Germany
Univ Freiburg, Freiburg Mat Res Ctr FMF, Stefan Meier Str 21, D-79104 Freiburg, Germany Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Sensors, Georges Koehler Allee 103, D-79110 Freiburg, Germany