A MEMS inertial switch with a single circular mass for universal sensitivity

被引：18

作者：

Cao, Yun ^{[1
]}

Xi, Zhanwen ^{[1
]}

Yu, Pingxin ^{[1
]}

Wang, Jiong ^{[1
]}

Nie, Weirong ^{[1
]}

机构：

[1] Nanjing Univ Sci & Technol, Sch Mech Engn, Nanjing 210094, Jiangsu, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2015年 / 25卷 / 10期

基金：

中国国家自然科学基金;

关键词：

inertial switch; universal sensitivity; acceleration threshold; MEMS; FABRICATION; SIMULATION; DESIGN;

D O I：

10.1088/0960-1317/25/10/105005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel micro-electro-mechanical systems (MEMS) inertial switch with universal sensitivity was investigated in this paper. Using a single circular mass, the switch was able to detect accelerations in all of the radial directions of a hemisphere. Four suspended springs with 90 degrees symmetry were employed to be compliant in all directions, and flexible stationary electrodes were used to allow for long-duration contact. More than forty switch prototypes were produced using a microfabrication process. Dynamic finite element analysis and shock table experiment were carried out to study the behavior of the proposed switch. The results indicated that universal sensitivity was successfully achieved by the new design. Agreement was achieved between the numerical predictions and actual test results for the acceleration thresholds in the different sensitive directions of a hemisphere.

引用

页数：11

共 20 条

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