Humidity sensor using planar optical waveguides with claddings of various oxide materials

被引:34
作者
Ansari, ZA
Karekar, RN
Aiyer, RC
机构
[1] UNIV PUNE,CTR ADV STUDIES MAT SCI & SOLID STATE PHYS,DEPT PHYS,PUNE 411007,MAHARASHTRA,INDIA
[2] UNIV PUNE,DEPT PHYS,R CHANDRASHEKHAR MEM FUND TRANSDUCER LAB,PUNE 411007,MAHARASHTRA,INDIA
关键词
ion-exchange waveguide; oxide cladding; humidity sensor;
D O I
10.1016/S0040-6090(97)00146-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A planar optical waveguide, fabricated using an ion-exchange process in soda glass (Na+ exchanged by K+), is studied as a humidity sensor with screen printed claddings of BriTiO(3), SnO2, Al2O3, ZrO2, V2O5 and ZnO as well as sintered ZnO, with cladding thicknesses between 20 and 25 mu m. A He-Ne laser beam (0.1 mm dirt., lambda = 632.8 nm, 0.5 mW) is coupled to the guide using prism film coupling and a silicon photovoltaic detector is used to measure the intensity of transmission. The lengths of the claddings used which give the maximum TM-polarization because of the relative attenuation, are between 3 and 5 mm. The relative humidity (RH) is varied from 3 to 98%. BaTiO3 offers maximum sensitivity as compared to the other oxides used. SnO2 exhibits a response time of 3 s and a recovery time of 10 min, the fastest amongst all. The maximum hysteresis of 1% is observed, except for V2O5 cladding (8%). The sensitivity curves show 3 regions, which are attributed to different possible dominant processes. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:330 / 335
页数:6
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