Simultaneous estimation of thickness and refractive index of layered gradient refractive index optics using a hybrid confocal-scan swept-source optical coherence tomography system

A hybrid confocal-scan swept-source optical coherence tomography metrology system was conceived for simultaneous measurements of the refractive index and thickness profiles of polymeric layered gradient refractive index (GRIN) optics. An uncertainty analysis predicts the metrology capability of the system and guides the selection of an optimum working numerical aperture. Experimental results on both a monolithic and a GRIN layered sheet are demonstrated to be in close agreement with theoretical predictions. Index measurement precision reached 0.0001 and 0.0008 for measuring 2.8 mm and similar to 300 mu m thick layers, respectively. The thicknesses of these layers were simultaneously measured with a precision of 0.28 and 0.17 mu m, respectively. (C) 2015 Optical Society of America