Interfacial properties for real rough MEMS/NEMS surfaces by incorporating the electrostatic and Casimir effects-a theoretical study

This paper studied the adhesive properties of real rough micro/nano-electromechanical systems (MEMS/NEMS) surfaces by considering the electrostatic force and the Casimir force theoretically, and an improved model has been proposed. A statistical approach for characterizing surface topography was used by taking the surface standard deviation, the asperity density and the radius of curvature into account. The effects of surface roughness on the electrostatic force and the Casimir force were analysed individually, and a comparison between the proposed model and existing models has been conducted. The whole adhesive force increases with the surface standard deviation, and the prediction by the proposed model becomes more in agreement with the one by existing models when the surface standard deviation is increased. The contribution of the Casimir force to the total adhesive force tends to vanish when the surface standard deviation is relatively large. The electrostatic force and the Casimir force contribute more to the total adhesive forces calculated based on the proposed model with the increase of the asperity density and the radius of curvature. Copyright (C) 2009 John Wiley & Sons, Ltd.