Study of VHF-band QCM gas sensor

被引：11

作者：

Nakamoto, T ^{[1
]}

Suzuki, Y ^{[1
]}

Moriizumi, T ^{[1
]}

机构：

[1] Tokyo Inst Technol, Grad Sch Sci & Engn, Tokyo 1528552, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2002年 / 84卷 / 2-3期

关键词：

VHF-band; QCM Mason equivalent circuit; mass loading effect; odor sensor QCM equivalent circuit;

D O I：

10.1016/S0925-4005(01)01066-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A VHF-band quartz crystal microbalance (QCM) gas sensor made up of a resonator with its thin quartz plate and a sensing film was studied to raise its sensitivity. The fundamental mode was used instead of the harmonic mode because of its high sensitivity, The sample flow system using a diffusion method was constructed and the experiment on the vapor exposure was performed. It was found that its sensitivity was one order of the magnitude improved when the 20 MHz resonator, the typical one was replaced by the 77 MHz one. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：98 / 105

页数：8

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