Effect of Plasma Treatments and Plasma-Polymerized Films on the Adhesion of Parylene-C to Substrates

被引：16

作者：

Zeniieh, Dani ^{[1
]}

Bajwa, Adeel ^{[1
]}

Ledernez, Loic ^{[1
]}

Urban, Gerald ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Sensors, D-79110 Freiburg, Germany

来源：

PLASMA PROCESSES AND POLYMERS | 2013年 / 10卷 / 12期

关键词：

adhesion; multilayers; parylenes; plasma polymerization; plasma treatment; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; MEASUREMENT MODELS; GLOW-DISCHARGE; COATINGS; SURFACE; EIS; TRIMETHYLSILANE; CONSTANT; BEHAVIOR; MEMS;

D O I：

10.1002/ppap.201300045

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This work deals with the most severe limitations of Parylene-C coatings, namely their poor adhesion to the substrate and barrier properties. To address these limitations, the surface properties of the substrate are modified prior to the Parylene deposition step by depositing a nano-film interfacial layer by means of a plasma polymerization process. The multilayer coating was realized using a newly designed, innovative multi-chamber system. Tests of dry adhesion (at 90 degrees and 180 degrees) and electrochemical impedance spectroscopic (EIS) measurements were performed to evaluate the effect of the plasma pre-processing. Adhesion strength of 3 and 6.8Ncm(-1) were recorded for the 90 degrees and 180 degrees tape tests, respectively, while an impedance level of 10(7)cm(-2) at 100Hz was registered by EIS measurement.

引用

页码：1081 / 1089

页数：9

共 52 条

[1] MEASUREMENT MODELS FOR ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY .1. DEMONSTRATION OF APPLICABILITY [J].

AGARWAL, P ;

ORAZEM, ME ;

GARCIARUBIO, LH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (07) :1917-1927

[2] Application of measurement models to impedance spectroscopy .3. Evaluation of consistency with the Kramers-Kronig relations [J].

Agarwal, P ;

Orazem, ME ;

GarciaRubio, LH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (12) :4159-4168

[3]

Arkles B., 2014, Silane coupling agents: connecting across boundaries, V3rd

[4]

Barsoukov E, 2000, J NEW MAT ELECT SYST, V3, P301

[5] Impedance of constant phase element (CPE)-blocked diffusion in film electrodes [J].

Bisquert, J ;

Garcia-Belmonte, G ;

Bueno, P ;

Longo, E ;

Bulhoes, LOS .

JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1998, 452 (02) :229-234

[6] EIS evaluation of attached and free polymer films [J].

Castela, ASL ;

Simoes, AM ;

Ferreira, MGS .

PROGRESS IN ORGANIC COATINGS, 2000, 38 (01) :1-7

[7] Identification of inductive behavior for polyaniline via electrochemical impedance spectroscopy [J].

Chen, WC ;

Wen, TC ;

Hu, CC ;

Gopalan, A .

ELECTROCHIMICA ACTA, 2002, 47 (08) :1305-1315

[8]

FORTIN JB, 2004, CHEM VAPOUR DEPOSITI

[9] A THEORY FOR ESTIMATION OF SURFACE AND INTERFACIAL ENERGIES .3. ESTIMATION OF SURFACE ENERGIES OF SOLIDS FROM CONTACT ANGLE DATA [J].

GOOD, RJ ;

GIRIFALCO, LA .

JOURNAL OF PHYSICAL CHEMISTRY, 1960, 64 (05) :561-565

[10] A NEW GENERAL SYNTHETIC METHOD FOR PREPARATION OF LINEAR POLY-P-XYLYLENES [J].

GORHAM, WF .

JOURNAL OF POLYMER SCIENCE PART A-1-POLYMER CHEMISTRY, 1966, 4 (12PA) :3027-&

← 1 2 3 4 5 6 →